JPS61134712A - Fixing structure of optical semiconductor module - Google Patents

Abstract

PURPOSE:To permit the sure and easy adjustment of the position of an optical axis and the adjustment of a crossing angle by fixing mechanically fixing parts by means of a slotted ball and a tapered ring. CONSTITUTION:The plane side of the tapered ring 7 is pressed to a light exit face 12 of an optical semiconductor package 1 and the slotted ball 8 is mated with the taper side of the ring 7; further the tapered ring 9 is pressed to the other side of the ball 8 and is fixed thereto by a set srew 20 via a washer 10. A ferrule 3 holding an optical fiber 2 is inserted into a ferrule insertion hole 82 of the ball 8 prior to fixing by said screw 20 and thereafter the screw 20 is rotated clockwise to push the ring 9 via the washer 10 in the arrow direction, then the ball 8 is grasped under the pressure by the ring 7 and the ring 9, by which the slot 81 is compressed to fix the ferrule 3 so as not to move. The optical axis and swing and tilt angle of the optical semiconductor element 11 and the fiber 2 are adjusted before fixing of the ferrule 3.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a fixing structure for an optical semiconductor module, and in particular to a fixing structure for an optical semiconductor module, in particular, by making it possible to easily adjust the optical axis angle between an optical semiconductor element and an optical fiber. The present invention relates to a fixing structure for an optical semiconductor module that can compensate for variations in precision of parts, light emission angles of optical semiconductor elements, etc., consistently obtains high coupling efficiency, and improves optical transmission characteristics.

[Conventional technology]

FIG. 6 is a side sectional view of a main part for explaining a conventional fixing structure of an optical semiconductor module.

The surface 41 of the ferrule holder 4, in which the ferrule 3 holding the optical fiber 2 is inserted into the ferrule insertion hole 42, is placed on the light exit surface 12 of the optical semiconductor package 1 enclosing the optical semiconductor element 1), and the surface 41 perpendicular to the optical axis is It slides into contact with the light exit surface 12 of the semiconductor pancake l to align the optical axis. To adjust the optical axis angle of the optical semiconductor element 1) and the optical fiber 2, move the ferrule 3 inserted into the ferrule holder 4 in the direction of the arrow, align the optical axis, adjust the optical axis angle, and then fix the optical axis with adhesive or welding. It is a structure.

FIG. 7 is a side sectional view of a main part for explaining a conventional fixing structure of an optical semiconductor module, and the same parts as in FIG. 4 are given the same reference numerals.

The light output surface 12 of the optical semiconductor package 1 enclosing the optical semiconductor element 1) and the ferrule 3 holding the optical fiber 2 are made to face each other, and the light output surface 12 of the optical semiconductor package 1 and the ferrule 3 are brought into contact t31I+! 5, the structure allows alignment of the optical axis and adjustment of the tilt angle.

[Problem that the invention seeks to solve]

In the fixing structure of the optical semiconductor module having the above configuration,
In the former structure (Fig. 6), it is impossible to adjust the tilt angle of the optical component, so there is a problem that the coupling efficiency between the optical fiber 2 and the optical semiconductor element 1) is poor. Although the structure makes it easy to adjust the tilt angle of the optical components, since the optical semiconductor package 1 and the optical fiber 2 are fixed with an adhesive 5, there are problems in that the coupling efficiency decreases over time. Ta.

[Means for solving problems]

The present invention provides a fixing structure for an optical semiconductor module that solves the above-mentioned conventional problems and can be fixed by mechanical or laser welding after tilt angle adjustment. In the fixing structure of the optical semiconductor module that consists of these fixing parts,
This can be done by mechanically fixing the fixing part with the slotted ball and a tapered ring, or by adjusting it with the processed ball and tapering and fixing it by laser welding.

[Effect]

” - The fixing structure of the light distribution semiconductor module utilizes the elasticity of a metal ball with slit processing to adjust the x-, y-, and z-axis positions of the optical components held inside, as well as the two-axis tilt angle of θ and φ. After adjustment, it is a practical structure in which the parts are fixed mechanically without changing the coupling efficiency, or adjustments are made using processed balls and tapered rings, and each part is fixed by laser welding.

〔Example〕

With reference to Ia1F Drawing 4, an embodiment of the fixing structure of the f, K, /+ (6; 'F invention°'' A-based 4-optical semiconductor) module will be described in detail.

FIG. 1 is a side sectional view for explaining one embodiment of the fixing structure for an optical semiconductor module according to the present invention, and the same parts as in FIG. 6 are given the same reference numerals.

A female screw 61 and a key groove 62 are formed at one end of the inner side of the outer cylinder 6 made of a metal that is not easily affected by temperature, such as stainless steel, and a terminal insertion hole 63 for the optical semiconductor element 1) is formed at the other end. The optical semiconductor element 1 is provided on the terminal insertion hole 63 side.
). Then, the flat side of the tapered ring 7 is brought into contact with the light output surface 12 of the optical semiconductor package 1, the slotted sphere 8 is aligned with the tapered side of the tapered ring 7, and the tapered ring 9 is placed on the other side of the slotted sphere 8. The ferrule 3 holding the optical fiber 2 is inserted into the ferrule insertion hole 82 of the slotted bulb 8 before being fixed with the fixing screw 20 through the washer 10. After inserting, turn the fixing screw 20 clockwise and push the tapered ring 9 in the direction of the arrow through the washer 10, the slotted ball 8 will be squeezed between the tapered ring 7 and the tapered ring 9, and the slotted ball 81 will be compressed. to fix the ferrule 3 so that it does not move. However, before fixing the ferrule 3, connect the optical semiconductor element 1) and the optical fiber 2.
Needless to say, it is necessary to adjust the optical axis and tilt angle to maintain a good coupling state.

Furthermore, in order to prevent rotational force from being applied to the slotted ball 8 that fixes the ferrule 3 due to the rotation of the fixing screw 20, a plurality of (two in the drawings) protrusions 101 are provided on the washer 10. Since the rotation of the fixing screw 20 does not affect the slotted ball 8, the slotted ball 8 moves along the keyway 62 formed therein.

FIG. 2 is a side sectional view for explaining another embodiment of the optical semiconductor module fixing structure according to the present invention. In FIG. 2, the fixing structure of the optical semiconductor module of the present invention is the same as in FIG. 1, and includes an optical semiconductor package, an optical fiber, a ferrule, an outer cylinder, a tapered ring, a slotted ball, a washer, a fixing screw, etc. , is characterized by an improved optical semiconductor package. Therefore, parts other than the optical semiconductor package are given the same symbols as in Figure 1.
Explanation of these parts will be omitted here.

The optical semiconductor package 21 that characterizes the present invention has lenses 212 and 213 enclosed in the optical semiconductor package 21 in addition to the optical semiconductor element explained in FIG. This is a structure that makes it easier to do this.

FIG. 3 is a side sectional view for explaining another embodiment of the optical semiconductor module fixing structure according to the present invention, in which the same parts as in FIG. 1 are designated by the same reference numerals.

Taper ring 7 on light exit surface 12 of optical semiconductor package 1
The flat side of the tapered ring 7 is brought into contact with the tapered side of the tapered ring 7 before the processed ball 22 is made of a metal that is not easily affected by temperature, such as stainless steel, and has a ferrule insertion hole 221 formed in the center. Then, the ferrule 3 holding the optical fiber 2 is inserted into the ferrule insertion hole 221 of the processed ball 22.
The structure is such that the welding points 31, 32, and 33 between each part are fixed by laser welding after the parts are inserted and matched with the tapered side of the tapered ring 7 and adjusted using an adjustment tool (not shown).

FIG. 4 is a side sectional view of a main part for explaining a jig for adjusting the fixing structure of an optical semiconductor module according to the present invention.

In FIG. 4, the fixing structure of the optical semiconductor module of the present invention is the same as in FIG. 1, including an optical semiconductor pancake, an optical fiber, a ferrule, and an outer cylinder.

It is equipped with a tapered ring, a slit bulb, a washer, a fixing screw, etc., and is used to adjust the optical axis alignment between the optical fiber 2 held by the ferrule 3 and the optical semiconductor element enclosed in the optical semiconductor package 1. It is characterized by the fact that it is carried out using a tool. Therefore, the same reference numerals as in FIG. 1 are given to the parts other than the adjustment jig, and the explanation of these parts will be omitted here.

This adjustment jig includes an X stage 13, a φ stage 14,
θ stage 15. Y stage 16. X stage 17° Consists of base 1B and arm 19, arm 19
The ferrule 3 is inserted into the H to adjust the optical axis. 14 and 15 are stages for adjusting the swing angle of the ferrule 3, and Rφ and Rθ are adjusted so that the center of rotation of each stage coincides with the center of the slotted ball 8 so that the adjustment can be made without difficulty. X stage 1
3 is for adjusting the ferrule 3 in the axial direction.

FIG. 5 is a side sectional view of a main part for explaining the jig for adjusting the optical semiconductor module explained in FIG. 3 according to the present invention. In FIG. 5, the fixing structure of the optical semiconductor module of the present invention is the same as in FIG. 3, including an optical semiconductor package,
Although it is equipped with an optical fiber, a ferrule, a tapered ring, a processed ball, etc., there is a treatment for adjusting the optical axis alignment between the optical fiber 2 held by the ferrule 3 and the optical semiconductor element 1) enclosed in the optical semiconductor pancake 1. It is characterized by the fact that it is carried out using a tool. Therefore, the same reference numerals as in FIG. 3 are given to the parts other than the adjustment jig, and the explanation of these parts will be omitted here.

This adjustment jig has a configuration in which a θ and φ stage 24 is placed on an X and Y stage 23, and an X stage 25 is further placed on this θ and φ stage 24. X,
The Y stage 23 holds the taper ring 7 with an arm 26 and adjusts the position of the ferrule 3 in the x and y directions. and θ.

The center of rotation of the φ stage 24 is made to coincide with the center of the processed ball 22, and is a stage for adjusting the swing angle of the ferrule 3. The second stage 25 is connected to the ferrule 3 by the arm 26.
, and perform adjustment in the optical axis direction (Z-axis direction). The coil spring 27 is interposed between the processed ball 22 and the X stage 25 and is pressed against the A taber ring 7.

After the optical axis direction (Z-axis direction 9) and other adjustments are made in this manner, the laser welding points 31 to 33 are welded and fixed by the laser nozzle 28.

In this embodiment, a configuration in which the ferrule 3 side is movable has been described, but a structure in which the ferrule 3 side is fixed and the optical semiconductor package 1 side is movable may also be used.

〔Effect of the invention〕

As is clear from the above explanation, according to the fixing structure of the optical semiconductor module according to the present invention, the optical axis position Wi, fJl
Since the iI adjustment and the crossing angle adjustment can be performed reliably and easily, the adjustment work can be performed efficiently and greatly contributes to improving reliability.

[Brief explanation of drawings]

FIG. 1 is a side sectional view for explaining one embodiment of the optical semiconductor module fixing structure according to the present invention, and FIG. 2 is a side sectional view for explaining another embodiment of the optical semiconductor module fixing structure according to the present invention. 3 is a side sectional view for explaining another embodiment of the optical semiconductor module fixing structure according to the present invention, and FIG. 4 is a side sectional view for explaining another embodiment of the optical semiconductor module fixing structure according to the present invention. FIG. 5 is a side cross-sectional view of a main part for explaining a jig for adjusting the structure, and FIG. FIG. In the figure, 1.21 is an optical semiconductor package, 2 is an optical fiber, 3 is a ferrule, 4 is a ferrule holder, 5 is an adhesive, 6 is an outer cylinder, 7.9 is a tapered ring, 8 is a slotted ball,
] 0 is a washer, 1) is an optical semiconductor element, 12 is a light exit surface, 13 is a Z stage, 14 is a φ stage, 15 is a θ stage, 16 is an X stage, 17 is an X stage, 18 is a base, 19 is an arm , 20 is a fixing screw, 22 is a processed ball,
23 is X, X stage, 24 is θ. φ stage, 25 is an X stage, 26 is an arm, 27 is a coiled spring, 28 is a laser nozzle, 31 to 33 are laser welding points, 41 is a surface perpendicular to the optical axis, 42.82 is a ferrule insertion hole, and 61 is a female 62 is a keyway, 63 is a terminal insertion hole, 81 is a slick, 101 is a protrusion, and 221 is a ferrule insertion hole. Figure 1 Figure 2 ψ Figure 3 22'I2 Figure 5 Date of use, 'jG1-134712 (5) Figure 6 Illustration 7

Claims (2)

[Claims] (1) In the fixing structure of an optical semiconductor module consisting of an optical semiconductor element, an optical fiber, and their fixing parts,
A fixing structure for an optical semiconductor module, characterized in that the fixing part is mechanically fixed by a slotted ball and a tapered ring. (2) Adjust the fixed part with a machined ball and a taper ring,
The fixing structure for an optical semiconductor module according to claim 1, wherein each component is fixed by laser welding.