JPS61134036U - - Google Patents

Info

Publication number
JPS61134036U
JPS61134036U JP1746985U JP1746985U JPS61134036U JP S61134036 U JPS61134036 U JP S61134036U JP 1746985 U JP1746985 U JP 1746985U JP 1746985 U JP1746985 U JP 1746985U JP S61134036 U JPS61134036 U JP S61134036U
Authority
JP
Japan
Prior art keywords
microscope
measured
image
probe
display unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1746985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0225235Y2 (US07534539-20090519-C00280.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1746985U priority Critical patent/JPH0225235Y2/ja
Publication of JPS61134036U publication Critical patent/JPS61134036U/ja
Application granted granted Critical
Publication of JPH0225235Y2 publication Critical patent/JPH0225235Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1746985U 1985-02-08 1985-02-08 Expired JPH0225235Y2 (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1746985U JPH0225235Y2 (US07534539-20090519-C00280.png) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1746985U JPH0225235Y2 (US07534539-20090519-C00280.png) 1985-02-08 1985-02-08

Publications (2)

Publication Number Publication Date
JPS61134036U true JPS61134036U (US07534539-20090519-C00280.png) 1986-08-21
JPH0225235Y2 JPH0225235Y2 (US07534539-20090519-C00280.png) 1990-07-11

Family

ID=30505200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1746985U Expired JPH0225235Y2 (US07534539-20090519-C00280.png) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPH0225235Y2 (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435928A (en) * 1987-07-30 1989-02-07 Tokyo Electron Ltd Semiconductor inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435928A (en) * 1987-07-30 1989-02-07 Tokyo Electron Ltd Semiconductor inspection device

Also Published As

Publication number Publication date
JPH0225235Y2 (US07534539-20090519-C00280.png) 1990-07-11

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