JPS61133737U - - Google Patents
Info
- Publication number
- JPS61133737U JPS61133737U JP1701785U JP1701785U JPS61133737U JP S61133737 U JPS61133737 U JP S61133737U JP 1701785 U JP1701785 U JP 1701785U JP 1701785 U JP1701785 U JP 1701785U JP S61133737 U JPS61133737 U JP S61133737U
- Authority
- JP
- Japan
- Prior art keywords
- filter unit
- transport device
- rail mechanism
- hanging support
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1701785U JPS61133737U (enExample) | 1985-02-12 | 1985-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1701785U JPS61133737U (enExample) | 1985-02-12 | 1985-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61133737U true JPS61133737U (enExample) | 1986-08-20 |
Family
ID=30504330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1701785U Pending JPS61133737U (enExample) | 1985-02-12 | 1985-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61133737U (enExample) |
-
1985
- 1985-02-12 JP JP1701785U patent/JPS61133737U/ja active Pending
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