JPS61133556U - - Google Patents

Info

Publication number

JPS61133556U

JPS61133556U JP1741685U JP1741685U JPS61133556U JP S61133556 U JPS61133556 U JP S61133556U JP 1741685 U JP1741685 U JP 1741685U JP 1741685 U JP1741685 U JP 1741685U JP S61133556 U JPS61133556 U JP S61133556U

Authority

JP

Japan

Prior art keywords

ion

disk

wafer

evaporation

source

Prior art date

1985-02-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 5
• 238000001704 evaporation Methods 0.000 claims description 5
• 239000010409 thin film Substances 0.000 claims description 4
• 238000007740 vapor deposition Methods 0.000 claims description 3
• 235000012431 wafers Nutrition 0.000 claims 5
• 230000032258 transport Effects 0.000 claims 2
• 230000015572 biosynthetic process Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2