JPS61133555U - - Google Patents

Info

Publication number
JPS61133555U
JPS61133555U JP1492085U JP1492085U JPS61133555U JP S61133555 U JPS61133555 U JP S61133555U JP 1492085 U JP1492085 U JP 1492085U JP 1492085 U JP1492085 U JP 1492085U JP S61133555 U JPS61133555 U JP S61133555U
Authority
JP
Japan
Prior art keywords
reaction vessel
hopper
valve
reaction
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1492085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351332Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1492085U priority Critical patent/JPH0351332Y2/ja
Publication of JPS61133555U publication Critical patent/JPS61133555U/ja
Application granted granted Critical
Publication of JPH0351332Y2 publication Critical patent/JPH0351332Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacture And Refinement Of Metals (AREA)
JP1492085U 1985-02-05 1985-02-05 Expired JPH0351332Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1492085U JPH0351332Y2 (enExample) 1985-02-05 1985-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1492085U JPH0351332Y2 (enExample) 1985-02-05 1985-02-05

Publications (2)

Publication Number Publication Date
JPS61133555U true JPS61133555U (enExample) 1986-08-20
JPH0351332Y2 JPH0351332Y2 (enExample) 1991-11-01

Family

ID=30500283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1492085U Expired JPH0351332Y2 (enExample) 1985-02-05 1985-02-05

Country Status (1)

Country Link
JP (1) JPH0351332Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7273566B2 (en) 2001-08-30 2007-09-25 Micron Technology, Inc. Gas compositions

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3204393U (ja) * 2015-12-01 2016-06-02 上海同舜家居用品有限公司 ツールなしで快速に組み立てできる収納キャビネット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7273566B2 (en) 2001-08-30 2007-09-25 Micron Technology, Inc. Gas compositions
US7470628B2 (en) 2001-08-30 2008-12-30 Micron Technology, Inc. Etching methods

Also Published As

Publication number Publication date
JPH0351332Y2 (enExample) 1991-11-01

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