JPS6113315A - Constant-temperature cooling water circulating device - Google Patents

Abstract

PURPOSE:To circulate cooling water with its temperature being maintained at a fixed level, by cooling the circulated cooling water by means of a cooling coil and, on the other hand, heating the cooling water by means of a heater to store cooling water of a fixed temperature in a water tank. CONSTITUTION:Cooling water in a water tank 1 is sent to a bypass pipe 4 through a supply side cooling water pipe 2 and further sent to a cooling water discharging pipe 6 by means of a cooling water circulating pump 5. The cooling water is then supplied to a cooling water supplying pipe 8 form the discharging pipe 6. After cooling a member or device to be cooled, the cooling water is sent to cooling water returning pipes 9 and 11 and then passed through a cooling coil 12 where the cooling water is cooled to a desired temperature. The water cooled by the cooling coil 12 is made to flow into the water tank 1 through the pipe 11. Thus the cooling water is circulated. A part of the cooling water is made to flow to a heater 14 where the water is heated through a pipe 13 branched from an appropriate position of the cooling water discharging pipe 6 and the heated water is made to flow into the cooling water returning pipe 11 between the cooling coil 12 and water tank 1.

Description

[Detailed description of the invention] The invention of this application relates to a constant temperature chilled water circulation device.

Traditionally, it has often been necessary to supply chilled water at a temperature between plus or minus 0.1°C in the manufacturing process of precision products, but the technology to achieve such strict temperature control is extremely difficult to master. However, no definitive technology has yet been developed.

Particularly in recent years, in the semiconductor manufacturing process, it is necessary to properly control the temperature during semiconductor manufacturing in order to improve the yield of semiconductor products, improve quality, lower manufacturing costs, and further increase production volume. There is. Above all, it is necessary to perform semiconductor manufacturing while ensuring temperature distribution control and adjusting the temperature distribution uniformly. Therefore, by measuring the temperature distribution state in advance and correcting the temperature rise and temperature drop, the sea urchin/... It should be proceeded to be manufactured in a temperature atmosphere.

By carrying out such operations, it is necessary to minimize the occurrence of actually defective products and to improve the yield.

However, in the past, this required continuous and sophisticated temperature control by extremely skilled engineers. Therefore, the invention of this application provides a constant-temperature chilled water circulating device for maintaining a constant temperature, instead of requiring advanced temperature control by a skilled professional engineer as in the past, and provides a constant-temperature chilled water circulation device for supplying constant-temperature chilled water. In addition to obtaining
Although the temperature of the return water has changed slightly, it is adjusted to a temperature that is practically the same as the temperature of the supply cold water, and the water temperature in the water storage tank is made to be the same temperature as the supply cold water. , and the purpose is to maintain the temperature of the supplied cold water at a virtually constant temperature at all times.

Next, a specific configuration for achieving the above object of the invention of this application will be explained with reference to the drawings. The entire drain pulp (3) is arranged near the lower end opening of (2), and a side pipe (4) is branched and arranged at the middle position of the pipe (2), and the tip of the side pipe (4) is provided. Cold water circulation pump (5)
from the cold water circulation pump (5) to the cold water discharge pipe (
6), and connect the cold water discharge pipe (6) to the cold water supply pipe (8) via the stop valve (7), and connect the cold water supply pipe (8) to the member to be cooled or For cooling the equipment, connect the piping to the cold water return pipe (9), connect the cold water return pipe (ltlK) via the stop valve Qi, and connect the cold water return pipe a◇ to the lower end of the cooling coil (6). and pass through the inside of the cold water return pipe C11) to the cooling coil α2.
A cold water circulating device main body is formed by discharging the cold water from the upper end and attaching the tip of the cold water return pipe α°C to an appropriate position on the upper circumferential side wall of the water storage tank (1), and the cold water discharge pipe (6)
A branch pipe α→ for the cold water discharge pipe is branched from an appropriate position, and the branch pipe α3 is passed through the heater α4 through a stop valve Q9, and the tip of the branch pipe α1 coming out from the heater α4 is connected to the A cold water return pipe α◇ interposed between the cooling coil (C) and the water storage tank (1) is connected to an appropriate position to form a cold water heating circuit, and the cooling coil (C) and the refrigerator α0 are connected to the pipe α◇. The refrigerator 00 and the condenser α frame are connected in parallel, and the condenser M and the cooling coil (2
) is connected with pipe a9 to form a cold water cooling circuit, and the fluorocarbon gas control valve is connected to the cooling coil υ of the pipe α).
is installed, and the sensing part 3il of the freon gas control valve (a) is installed.
is installed in a position near the cooling coil of pipe a, and a conductive wire @ is connected between the freon gas control valve handle and the sensing portion I2◇ of the control valve handle to form a temperature control circuit for the chilled water cooling circuit. , a temperature measuring terminal (contact) is arranged near the tip of the cold water return pipe αD attached at an appropriate position on the upper circumferential side wall of the water storage tank (1) of the cold water heating circuit, and a water temperature regulator (c) and the temperature measuring terminal Connect the terminal (to) with a conductor (to), connect the water temperature regulator and the heater 04 with a conductor (a), and place the heater α4 and the cold water discharge pipe (6) at appropriate positions. Connect the pressure switch for preventing dry firing with a conductor @, and arrange a temperature measuring terminal (G) at an appropriate position of the cold water discharge pipe (6),
This is a constant temperature cold water circulation device in which the temperature measuring terminal (to) and the digital temperature indicator (to) are connected by a conductor 3. In the drawings, reference numeral 32 indicates a cold water upper limit temperature regulator, and reference numeral 33 indicates a chilled water upper limit temperature regulator.
indicates a chilled water lower limit temperature controller.

Next, to explain the effects resulting from the above configuration, first, the cold water in the water storage tank (1 inch) is sent to the supply side cold water pipe (2), then to the side pipe (4), and the cold water circulation pump (5) is sent to the cold water circulation pump (5). The drive sends the cold water to the cold water discharge pipe (6), and further sends the cold water to the cold water supply pipe (8), where the cold water cools the cooled member or device, and the cold water circulating around the pipe is turned into cold water. The cold water is sent to the return pipe (9), where it is then sent to the cold water return pipe I, and the cold water is cooled to the desired temperature through the cooling coil α2f: and the cold water cooled by the cooling coil αa is passed through the cold water return pipe αD to the water storage tank. (1), the cold water is circulated through the pipe line mentioned above.Then, a part of the cold water flows through a branch pipe d3 branched from an appropriate position of the cold water discharge pipe (6), and is heated through the heater 04. It flows into the pipe α◇ between the cooling coil 0 and the water storage tank (1).The cold water circulated there is cooled by the cooling coil υ and heated by the heater α4 on the other hand, so that it is always kept in the water storage tank (1). By storing cold water at a constant temperature inside the tank, the cold water can be kept at a constant temperature and circulated.

[Brief explanation of the drawing]

The drawing is a diagram showing a cold water circulation circuit of a constant temperature cold water circulation device according to the invention of this application. 1, water storage tank 2, supply side cold water pipe 6, drain pulp 4, drain pipe 5, cold water circulation pump 6, cold water discharge pipe 7, stop valve a, cold water supply pipe 9, cold water return pipe 10, stop valve 11, cold water return pipe 12, Cooling coil 13, branch pipe 14, heater 15, stop valve 16, refrigerator 17, pipe 18, condenser 19 pipe 20, fluorocarbon gas control valve 21, sensing section 22, conductive wire 23, temperature measuring terminal 24, water temperature regulator 25, conductive wire 26, conductive wire 27, pressure switch 2a for dry firing prevention lead wire 29, temperature measurement terminal 30, digital temperature indicator 31, lead wire 32, chilled water upper limit temperature regulator 36, chilled water lower limit temperature regulator

Claims (1)

[Claims] A pipe connects the water storage tank and the component or device to be cooled, and the cold water is circulated, and a circulation pump is installed in the cold water circulation pipe to enable forced circulation of the cold water. The circulating water can be cooled by interposing a cooling coil, and the circulating water can be heated by intervening a separate heater circuit, and the circulating water cooling and circulating water heating are adjusted by a temperature adjustment mechanism. Constant temperature cold water circulation device.