JPS61132841U - - Google Patents

Info

Publication number
JPS61132841U
JPS61132841U JP1985016957U JP1695785U JPS61132841U JP S61132841 U JPS61132841 U JP S61132841U JP 1985016957 U JP1985016957 U JP 1985016957U JP 1695785 U JP1695785 U JP 1695785U JP S61132841 U JPS61132841 U JP S61132841U
Authority
JP
Japan
Prior art keywords
mask
rotary table
chuck
rectangular
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985016957U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323707Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985016957U priority Critical patent/JPS6323707Y2/ja
Publication of JPS61132841U publication Critical patent/JPS61132841U/ja
Application granted granted Critical
Publication of JPS6323707Y2 publication Critical patent/JPS6323707Y2/ja
Expired legal-status Critical Current

Links

JP1985016957U 1985-02-08 1985-02-08 Expired JPS6323707Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985016957U JPS6323707Y2 (enrdf_load_stackoverflow) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985016957U JPS6323707Y2 (enrdf_load_stackoverflow) 1985-02-08 1985-02-08

Publications (2)

Publication Number Publication Date
JPS61132841U true JPS61132841U (enrdf_load_stackoverflow) 1986-08-19
JPS6323707Y2 JPS6323707Y2 (enrdf_load_stackoverflow) 1988-06-29

Family

ID=30504215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985016957U Expired JPS6323707Y2 (enrdf_load_stackoverflow) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPS6323707Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6323707Y2 (enrdf_load_stackoverflow) 1988-06-29

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