JPS61132398U - - Google Patents
Info
- Publication number
- JPS61132398U JPS61132398U JP1488385U JP1488385U JPS61132398U JP S61132398 U JPS61132398 U JP S61132398U JP 1488385 U JP1488385 U JP 1488385U JP 1488385 U JP1488385 U JP 1488385U JP S61132398 U JPS61132398 U JP S61132398U
- Authority
- JP
- Japan
- Prior art keywords
- rotates
- rotation
- provided corresponding
- main shaft
- rotating disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims 2
- 210000000078 claw Anatomy 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Forklifts And Lifting Vehicles (AREA)
- Mechanical Control Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1488385U JPH0229118Y2 (enExample) | 1985-02-05 | 1985-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1488385U JPH0229118Y2 (enExample) | 1985-02-05 | 1985-02-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61132398U true JPS61132398U (enExample) | 1986-08-18 |
| JPH0229118Y2 JPH0229118Y2 (enExample) | 1990-08-03 |
Family
ID=30500216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1488385U Expired JPH0229118Y2 (enExample) | 1985-02-05 | 1985-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229118Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004008524A1 (ja) * | 2002-06-20 | 2004-01-22 | Disco Corporation | ウェーハカセット |
-
1985
- 1985-02-05 JP JP1488385U patent/JPH0229118Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004008524A1 (ja) * | 2002-06-20 | 2004-01-22 | Disco Corporation | ウェーハカセット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0229118Y2 (enExample) | 1990-08-03 |
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