JPS61131640U - - Google Patents
Info
- Publication number
- JPS61131640U JPS61131640U JP1568385U JP1568385U JPS61131640U JP S61131640 U JPS61131640 U JP S61131640U JP 1568385 U JP1568385 U JP 1568385U JP 1568385 U JP1568385 U JP 1568385U JP S61131640 U JPS61131640 U JP S61131640U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- semiconductor
- pressure
- thin film
- glass thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1568385U JPS61131640U (pt) | 1985-02-06 | 1985-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1568385U JPS61131640U (pt) | 1985-02-06 | 1985-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61131640U true JPS61131640U (pt) | 1986-08-16 |
Family
ID=30501748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1568385U Pending JPS61131640U (pt) | 1985-02-06 | 1985-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61131640U (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH028723A (ja) * | 1988-06-27 | 1990-01-12 | Shindengen Electric Mfg Co Ltd | 圧力検出装置 |
| JP2005043351A (ja) * | 2003-07-04 | 2005-02-17 | Robert Bosch Gmbh | マイクロマシニング型の圧力センサ |
-
1985
- 1985-02-06 JP JP1568385U patent/JPS61131640U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH028723A (ja) * | 1988-06-27 | 1990-01-12 | Shindengen Electric Mfg Co Ltd | 圧力検出装置 |
| JP2005043351A (ja) * | 2003-07-04 | 2005-02-17 | Robert Bosch Gmbh | マイクロマシニング型の圧力センサ |