JPS611312Y2 - - Google Patents

Info

Publication number
JPS611312Y2
JPS611312Y2 JP14771279U JP14771279U JPS611312Y2 JP S611312 Y2 JPS611312 Y2 JP S611312Y2 JP 14771279 U JP14771279 U JP 14771279U JP 14771279 U JP14771279 U JP 14771279U JP S611312 Y2 JPS611312 Y2 JP S611312Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14771279U
Other languages
Japanese (ja)
Other versions
JPS5666749U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14771279U priority Critical patent/JPS611312Y2/ja
Publication of JPS5666749U publication Critical patent/JPS5666749U/ja
Application granted granted Critical
Publication of JPS611312Y2 publication Critical patent/JPS611312Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)
JP14771279U 1979-10-26 1979-10-26 Expired JPS611312Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14771279U JPS611312Y2 (cg-RX-API-DMAC7.html) 1979-10-26 1979-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14771279U JPS611312Y2 (cg-RX-API-DMAC7.html) 1979-10-26 1979-10-26

Publications (2)

Publication Number Publication Date
JPS5666749U JPS5666749U (cg-RX-API-DMAC7.html) 1981-06-03
JPS611312Y2 true JPS611312Y2 (cg-RX-API-DMAC7.html) 1986-01-17

Family

ID=29378850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14771279U Expired JPS611312Y2 (cg-RX-API-DMAC7.html) 1979-10-26 1979-10-26

Country Status (1)

Country Link
JP (1) JPS611312Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054764A (ja) * 1983-09-06 1985-03-29 Chugai Ro Kogyo Kaisha Ltd 塗料焼付装置
KR102783797B1 (ko) 2021-09-09 2025-03-18 엔지케이 인슐레이터 엘티디 웨이퍼 배치대
JP7583698B2 (ja) 2021-10-08 2024-11-14 日本碍子株式会社 ウエハ載置台
JP7514811B2 (ja) 2021-10-14 2024-07-11 日本碍子株式会社 ウエハ載置台
JP7554171B2 (ja) 2021-10-19 2024-09-19 日本碍子株式会社 ウエハ載置台
JP7580361B2 (ja) 2021-11-10 2024-11-11 日本碍子株式会社 ウエハ載置台
JP7522089B2 (ja) 2021-11-10 2024-07-24 日本碍子株式会社 ウエハ載置台
US20230238258A1 (en) 2022-01-27 2023-07-27 Ngk Insulators, Ltd. Wafer placement table, and member for semiconductor manufacturing apparatus, using the same

Also Published As

Publication number Publication date
JPS5666749U (cg-RX-API-DMAC7.html) 1981-06-03

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