JPS61131263U - - Google Patents
Info
- Publication number
- JPS61131263U JPS61131263U JP1559785U JP1559785U JPS61131263U JP S61131263 U JPS61131263 U JP S61131263U JP 1559785 U JP1559785 U JP 1559785U JP 1559785 U JP1559785 U JP 1559785U JP S61131263 U JPS61131263 U JP S61131263U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- center
- centers
- movable table
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1559785U JPS61131263U (zh) | 1985-02-06 | 1985-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1559785U JPS61131263U (zh) | 1985-02-06 | 1985-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61131263U true JPS61131263U (zh) | 1986-08-16 |
Family
ID=30501580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1559785U Pending JPS61131263U (zh) | 1985-02-06 | 1985-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61131263U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6397447U (zh) * | 1986-12-16 | 1988-06-23 |
-
1985
- 1985-02-06 JP JP1559785U patent/JPS61131263U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6397447U (zh) * | 1986-12-16 | 1988-06-23 |