JPS61130784U - - Google Patents

Info

Publication number
JPS61130784U
JPS61130784U JP1269785U JP1269785U JPS61130784U JP S61130784 U JPS61130784 U JP S61130784U JP 1269785 U JP1269785 U JP 1269785U JP 1269785 U JP1269785 U JP 1269785U JP S61130784 U JPS61130784 U JP S61130784U
Authority
JP
Japan
Prior art keywords
piezo
vibrator
hole
piezo elements
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1269785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128313Y2 (US06818201-20041116-C00086.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1269785U priority Critical patent/JPH0128313Y2/ja
Publication of JPS61130784U publication Critical patent/JPS61130784U/ja
Application granted granted Critical
Publication of JPH0128313Y2 publication Critical patent/JPH0128313Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1269785U 1985-01-31 1985-01-31 Expired JPH0128313Y2 (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1269785U JPH0128313Y2 (US06818201-20041116-C00086.png) 1985-01-31 1985-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1269785U JPH0128313Y2 (US06818201-20041116-C00086.png) 1985-01-31 1985-01-31

Publications (2)

Publication Number Publication Date
JPS61130784U true JPS61130784U (US06818201-20041116-C00086.png) 1986-08-15
JPH0128313Y2 JPH0128313Y2 (US06818201-20041116-C00086.png) 1989-08-29

Family

ID=30496006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1269785U Expired JPH0128313Y2 (US06818201-20041116-C00086.png) 1985-01-31 1985-01-31

Country Status (1)

Country Link
JP (1) JPH0128313Y2 (US06818201-20041116-C00086.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006220056A (ja) * 2005-02-10 2006-08-24 Nec Tokin Corp 流体搬送装置
KR100868898B1 (ko) * 2007-07-30 2008-11-14 한국기계연구원 적층형 pzt를 이용한 압전펌프
WO2017135206A1 (ja) * 2016-02-01 2017-08-10 株式会社村田製作所 気体制御装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006220056A (ja) * 2005-02-10 2006-08-24 Nec Tokin Corp 流体搬送装置
KR100868898B1 (ko) * 2007-07-30 2008-11-14 한국기계연구원 적층형 pzt를 이용한 압전펌프
WO2017135206A1 (ja) * 2016-02-01 2017-08-10 株式会社村田製作所 気体制御装置
JPWO2017135206A1 (ja) * 2016-02-01 2018-02-08 株式会社村田製作所 気体制御装置
US11378071B2 (en) 2016-02-01 2022-07-05 Murata Manufacturing Co., Ltd. Gas control device
US12000389B2 (en) 2016-02-01 2024-06-04 Murata Manufacturing Co., Ltd. Gas control device

Also Published As

Publication number Publication date
JPH0128313Y2 (US06818201-20041116-C00086.png) 1989-08-29

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