JPS61130783U - - Google Patents
Info
- Publication number
- JPS61130783U JPS61130783U JP1985012695U JP1269585U JPS61130783U JP S61130783 U JPS61130783 U JP S61130783U JP 1985012695 U JP1985012695 U JP 1985012695U JP 1269585 U JP1269585 U JP 1269585U JP S61130783 U JPS61130783 U JP S61130783U
- Authority
- JP
- Japan
- Prior art keywords
- piezo
- hole
- piezo elements
- vibrator
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985012695U JPH0128312Y2 (https=) | 1985-01-31 | 1985-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985012695U JPH0128312Y2 (https=) | 1985-01-31 | 1985-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61130783U true JPS61130783U (https=) | 1986-08-15 |
| JPH0128312Y2 JPH0128312Y2 (https=) | 1989-08-29 |
Family
ID=30496002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985012695U Expired JPH0128312Y2 (https=) | 1985-01-31 | 1985-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0128312Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005214113A (ja) * | 2004-01-30 | 2005-08-11 | Casio Comput Co Ltd | ポンプ装置及びダイヤフラムアクチュエータ |
| WO2012140931A1 (ja) * | 2011-04-11 | 2012-10-18 | 株式会社村田製作所 | 流体制御装置およびポンプ接続方法 |
-
1985
- 1985-01-31 JP JP1985012695U patent/JPH0128312Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005214113A (ja) * | 2004-01-30 | 2005-08-11 | Casio Comput Co Ltd | ポンプ装置及びダイヤフラムアクチュエータ |
| WO2012140931A1 (ja) * | 2011-04-11 | 2012-10-18 | 株式会社村田製作所 | 流体制御装置およびポンプ接続方法 |
| JP2015092082A (ja) * | 2011-04-11 | 2015-05-14 | 株式会社村田製作所 | 流体制御装置およびポンプ接続方法 |
| JP5776767B2 (ja) * | 2011-04-11 | 2015-09-09 | 株式会社村田製作所 | 流体制御装置およびポンプ接続方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0128312Y2 (https=) | 1989-08-29 |