JPS61130783U - - Google Patents

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Publication number
JPS61130783U
JPS61130783U JP1985012695U JP1269585U JPS61130783U JP S61130783 U JPS61130783 U JP S61130783U JP 1985012695 U JP1985012695 U JP 1985012695U JP 1269585 U JP1269585 U JP 1269585U JP S61130783 U JPS61130783 U JP S61130783U
Authority
JP
Japan
Prior art keywords
piezo
hole
piezo elements
vibrator
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985012695U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128312Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985012695U priority Critical patent/JPH0128312Y2/ja
Publication of JPS61130783U publication Critical patent/JPS61130783U/ja
Application granted granted Critical
Publication of JPH0128312Y2 publication Critical patent/JPH0128312Y2/ja
Expired legal-status Critical Current

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  • Reciprocating Pumps (AREA)
JP1985012695U 1985-01-31 1985-01-31 Expired JPH0128312Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985012695U JPH0128312Y2 (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985012695U JPH0128312Y2 (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Publications (2)

Publication Number Publication Date
JPS61130783U true JPS61130783U (enrdf_load_stackoverflow) 1986-08-15
JPH0128312Y2 JPH0128312Y2 (enrdf_load_stackoverflow) 1989-08-29

Family

ID=30496002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985012695U Expired JPH0128312Y2 (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Country Status (1)

Country Link
JP (1) JPH0128312Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005214113A (ja) * 2004-01-30 2005-08-11 Casio Comput Co Ltd ポンプ装置及びダイヤフラムアクチュエータ
WO2012140931A1 (ja) * 2011-04-11 2012-10-18 株式会社村田製作所 流体制御装置およびポンプ接続方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005214113A (ja) * 2004-01-30 2005-08-11 Casio Comput Co Ltd ポンプ装置及びダイヤフラムアクチュエータ
WO2012140931A1 (ja) * 2011-04-11 2012-10-18 株式会社村田製作所 流体制御装置およびポンプ接続方法
JP2015092082A (ja) * 2011-04-11 2015-05-14 株式会社村田製作所 流体制御装置およびポンプ接続方法
JP5776767B2 (ja) * 2011-04-11 2015-09-09 株式会社村田製作所 流体制御装置およびポンプ接続方法

Also Published As

Publication number Publication date
JPH0128312Y2 (enrdf_load_stackoverflow) 1989-08-29

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