JPS61130394U - - Google Patents

Info

Publication number

JPS61130394U

JPS61130394U JP1125385U JP1125385U JPS61130394U JP S61130394 U JPS61130394 U JP S61130394U JP 1125385 U JP1125385 U JP 1125385U JP 1125385 U JP1125385 U JP 1125385U JP S61130394 U JPS61130394 U JP S61130394U

Authority

JP

Japan

Prior art keywords

cleaning

wall

cleaning liquid

tank

cleaning tank

Prior art date

1985-01-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 20
• 239000007788 liquid Substances 0.000 claims description 7
• 239000007921 spray Substances 0.000 claims 2
• 238000007599 discharging Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 1
• 238000011084 recovery Methods 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1

Cited By (2)