JPS61129662U - - Google Patents

Info

Publication number
JPS61129662U
JPS61129662U JP1352185U JP1352185U JPS61129662U JP S61129662 U JPS61129662 U JP S61129662U JP 1352185 U JP1352185 U JP 1352185U JP 1352185 U JP1352185 U JP 1352185U JP S61129662 U JPS61129662 U JP S61129662U
Authority
JP
Japan
Prior art keywords
clamp
bar
clamp bar
support
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1352185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH041016Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1352185U priority Critical patent/JPH041016Y2/ja
Publication of JPS61129662U publication Critical patent/JPS61129662U/ja
Application granted granted Critical
Publication of JPH041016Y2 publication Critical patent/JPH041016Y2/ja
Expired legal-status Critical Current

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  • Intermediate Stations On Conveyors (AREA)
JP1352185U 1985-02-01 1985-02-01 Expired JPH041016Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1352185U JPH041016Y2 ( ) 1985-02-01 1985-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1352185U JPH041016Y2 ( ) 1985-02-01 1985-02-01

Publications (2)

Publication Number Publication Date
JPS61129662U true JPS61129662U ( ) 1986-08-14
JPH041016Y2 JPH041016Y2 ( ) 1992-01-14

Family

ID=30497607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1352185U Expired JPH041016Y2 ( ) 1985-02-01 1985-02-01

Country Status (1)

Country Link
JP (1) JPH041016Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156954A (ja) * 1989-11-15 1991-07-04 Ebara Corp ウエハキャリヤの洗浄槽に設けられる位置決め装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156954A (ja) * 1989-11-15 1991-07-04 Ebara Corp ウエハキャリヤの洗浄槽に設けられる位置決め装置

Also Published As

Publication number Publication date
JPH041016Y2 ( ) 1992-01-14

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