JPS61127640U - - Google Patents
Info
- Publication number
- JPS61127640U JPS61127640U JP936485U JP936485U JPS61127640U JP S61127640 U JPS61127640 U JP S61127640U JP 936485 U JP936485 U JP 936485U JP 936485 U JP936485 U JP 936485U JP S61127640 U JPS61127640 U JP S61127640U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- semiconductor wafer
- semiconductor
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 9
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP936485U JPS61127640U (enExample) | 1985-01-26 | 1985-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP936485U JPS61127640U (enExample) | 1985-01-26 | 1985-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61127640U true JPS61127640U (enExample) | 1986-08-11 |
Family
ID=30489513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP936485U Pending JPS61127640U (enExample) | 1985-01-26 | 1985-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61127640U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64743A (en) * | 1987-02-13 | 1989-01-05 | Tokyo Electron Ltd | Counter for wafer |
-
1985
- 1985-01-26 JP JP936485U patent/JPS61127640U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64743A (en) * | 1987-02-13 | 1989-01-05 | Tokyo Electron Ltd | Counter for wafer |