JPS61126613A - Production for magnetic head - Google Patents

Abstract

PURPOSE:To work many tracks at a time with a high precision by butting magnetic bodies which are worked into comb shapes by grooving both sides of track forming parts and processing grooves on both sides for forming a track width by ion beam etching. CONSTITUTION:A metallic mask 6 set to a prescribed narrow track width is formed on or both of ferrite blocks for the purpose of forming tacks of magnetic head, and prescribed grooves 7 for gaps having several tens mu width are formed by ion beam etching to form comb-shaped tracks 8, and track width dimensions are determined. These ferrite block 5 worked into comb shapes are butted, and a glass 10 is flowed to even parts of grooves 7, and prescribed track width is formed by cutting along long and double short dash alternating lines. By this method, dimensions of the track width are obtained with <=1mu working precision, and parts corresponding to the track width are not cracked in the ion beam etching work, and the etching surface is grooved with a high surface precision.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a magnetic head made of 7-elite and having a narrow track width, which is mounted on a magnetic disk device or the like.

Recently, as the density of magnetic disk drives has increased, the track width of magnetic heads has become narrower and more dense processing has become necessary. Conventionally, the processing of this type of magnetic head was
Machining methods such as grinding or polishing have been used, but due to the brittleness of the head material, machining of more than 10 μm causes a significant drop in manufacturing yield and head performance. That is, in conventional formation of this type of track width and gap length, for example, as shown in FIG. 1, grooves 2 are formed on both sides of both blocks 1 so as to leave the track width dimension in a comb shape in order to butt each other. so that a comb-like track 3 is formed. That is, the combing process is performed by machining, and then, as shown in Figure #2, the two blocks 1 and 1' are butted together and glass or resin 4 is poured, forming a predetermined gap and track width as shown in Figure 3. It is beginning to form.

However, in this method, since the track width is formed by machining, it is difficult to form the comb-shaped track 3 without chipping or chipping during machining, and the dimensions are also limited. Because it often relies on accuracy,
Difficult to process accurately.

Furthermore, when forming grooves 2 by machining, the amount of machining is reduced to prevent chipping, chipping, etc., which results in an excessively long machining time. If the grinding is done with a grindstone, the disadvantage is that sufficient surface accuracy cannot be obtained on the ground surface. Therefore, there is a drawback that bubbles are generated in the glass during glass molding or bonding, which causes deterioration of the characteristics of the head.

In view of the above, the present invention has been developed by using ion beam etching to form grooves on one or both sides forming the track width, thereby making it possible to easily and accurately process a large number of tracks at once. The main purpose is to propose a method for manufacturing heads.

An embodiment of the present invention will be described in detail below with reference to the drawings.

4 to 7 are process diagrams showing one embodiment of the present invention. First, in order to form the F-rack of the magnetic haird, as shown in FIG.
In order to form the width, a metal matrix 6 with a predetermined narrow track width is formed by 7-off etching, and then a fifth
As shown in the figure, several tens of microns are etched by ion beam etching.
The predetermined gear knob groove 7 of lfi is completely removed to form a comb-like track 8, and the track width dimension is determined.

Then, as shown in FIG. 6, a comb-like process is performed on one block 9 and the other Ikekata block 9, and the 7 elite blocks 5 are butted together, and glass 10 is poured into the groove 7 at the same time as glass bonding to form the gap. Finally, by cutting as shown by the two-dot chain line, a predetermined track width is formed.

By using this method, the track width dimension is 7
The machining accuracy of etching (1 μm or less) can be obtained, and in addition, ion beam etching does not cause chipping or chipping in the area corresponding to the track width, and the etched surface can be grooved with sufficient surface accuracy. It is possible. Furthermore, since the process uses 7-oto etching and ion beam etching, it is possible to process a large number of items at once.

In addition, as shown in Figure 7, both 7 elite bronok 5, 5
' may be subjected to an etching process as shown in FIG. 5, and the two may be butted and bonded.

As described above, according to the present invention, the magnetic materials that have been grooved and comb-shaped on both sides of the track forming portion are butted against each other, and the grooves on both sides for forming the track width are processed by ion beam etching. As a result, it is possible to easily form a large amount of track widths at once with sufficient accuracy, and it is possible to provide a magnetic head having a fine track width.

[Brief explanation of the drawing]

FIG. 1 is a process diagram of a conventional comb-like process for forming a track width on a ferrite block, and FIG. 2 is a process diagram of the same process. FIG. 3 is a perspective view after completing the same bonding as above, and FIG. 4 is a process diagram showing an example of the present invention in which a metal mask is provided by 7-etching to perform ion beam etching processing.
FIG. 5 is a process diagram in which the track width is similarly formed by ion beam etching, FIG. 6 is a perspective view at the end of bonding, and FIG. 7 is a process diagram showing an example of the pond of the present invention. 5.5', 9...7 elite book a, 6...metal mask, 7...groove for forming track link width, 8...
...Comb-shaped track, 9...Glass or resin.

Claims (1)

[Claims] A magnetic head characterized in that magnetic materials having grooves formed on both sides of the track forming portion and comb-shaped are butted against each other, and the grooves on both sides for forming the track width are processed by ion beam etching. manufacturing method.