JPS61125749A - Composite table - Google Patents

Abstract

PURPOSE:To improve accuracy of indexing and positioning of a surface serving to place a cut and fed member by arranging a cut and feed table for placing a workpiece on an indexing table. CONSTITUTION:A composite table consists of an indexing table 1 having a linearly indexing function and a cut and feed table provided on said indexing table 1 and having a function of cutting and feeding a workpiece. In addition, an indexing table body 10 is slidably provided on a first sliding guide bearing 11. The same is driven by a feed screw 14 adapted to thread into a female screw member 15 and an indexing motion. Moreover, a cut and feed table body 20 is slidably provided on a second sliding guide shaft 22 provided on the indexing table 1 via a sliding guide bearing 21. The same is driven by a feed screw 24 adapted to thread into a female screw member 25 and a cutting and feeding motor 23.

Description

[Detailed description of the invention] Industrial applications The present invention relates to a table in a processing device.

In particular, the present invention relates to a composite table on which a processing tool or a workpiece can be placed and which can perform linear indexing feeding and cutting feeding.

In recent years, very strict machining accuracy has been required for conventional technology machining equipment.

For example, in ultra-precision processing equipment such as guicers and slicers that are applied to dicing semiconductor wafers and grooving magnetic heads, indexing and positioning that determines the groove processing position must be performed with high precision. There is a particular demand for improving machining accuracy.

Conventionally, indexing and positioning in dicers, slicers, etc. has been carried out by providing an indexing and positioning device on a table on which a processing tool or a workpiece is placed.

In recent years, an indexing positioning device has been developed that is equipped with a closed-loop feedback control device using an incremental linear scale with a high resolution of 1 μm as a detection means. By employing the indexing and positioning device, the indexing and positioning of tables in dicers, slicers, etc. can be performed with high precision.

For example, a description will be given of a processing table shown in FIG. 4 on which a workpiece is placed.

The processing table shown in FIG. 4 is a composite table consisting of an indexing table 1 having a linear indexing function and a cutting feed table 2 provided on the indexing table 1 and having a cutting feed function. It is equipped with an indexing and positioning device 3 that performs positioning control.

That is, in the indexing table 1, an indexing table main body 10, which is slidably provided on a first sliding guide shaft 12 provided on the body 4 via a sliding guide bearing 11, is screwed into a female screw member 15. Matching feed screw 14 and indexing motor 1
It is configured such that linear indexing is possible using an indexing drive device consisting of three parts.

The cutting feed table 2 has a cutting feed table main body 20 which is slidably provided on a second sliding guide shaft 22 provided on the indexing table l via a sliding guide bearing 21, and is screwed into a female screw member 25. It is constructed so that cutting can be fed by a cutting feed drive device comprising a matching feed screw 24 and a cutting feed motor 23.

The indexing positioning device 3 is an incremental linear scale 31 having a high resolution of 0.1 μm.
．． 32 as a detection means, and the scale portion 31 of the linear scale 31, 32 is provided on the sliding guide bearing 11 of the indexing table 1 so as to be along the upper surface of the first FI motion guide shaft 12. , a detection section 32 of a linear scale is provided in the body 4.

The machining table is constructed as described above, and when performing machining work, the indexing motor 13 is started by the program control device 6, and the feed screw 14. The index table main body 10 is moved via the female screw member 15. When the index table main body 10 is moved, the scale part 31 of the linear scale is also moved together. When the scale section 31 moves, the amount of movement of the scale section 31 is detected by the detection section 32 of the linear scale. When the detected movement amount of the scale section 31 reaches a set value, the indexing motor 13 is stopped by a signal from the closed-loop feedback control device 33.
Indexing and positioning of the indexing table main body 100 is completed. Thereafter, the cutting feed motor 23 is started by the Sakiki program control device 6, and the feed screw 24. The cutting feed table main body 20 is fed for cutting via the female screw member 25. At this time, the workpiece placed on the cutting feed table main body 20 is grooved by the rotary cutter 5. Thereafter, the program control device 6 returns m and b of the above feed to form a predetermined number of grooves one after another.

In the above, the indexing table main body 10, the incremental type linear scale 31 having high resolution,
Index positioning device equipped with 32:
Since the processing table is indexed and positioned, the processing table is indexed and positioned with high precision. As a result, the dicer equipped with the processing table can process and form grooves on the workpiece with high precision.

However, in the processing table, there is a problem in that the indexing positioning accuracy of the indexing table main body 10 is difficult to reproduce with the indexing positioning accuracy of the groove formed in the workpiece. In particular, when the accuracy of positioning the index of the groove formed in the workpiece is very strict, the above-mentioned problem will have a large influence.

Purpose of the Invention As a result of intensive research aimed at solving the above-mentioned problems, the present inventor discovered that the pitching on the upper surface of the first sliding guide shaft 12 of the 111Il extrusion table main body 10 is expanded to the upper surface of the cutting feed table main body 20. However, by making the upper surface of the first sliding guide shaft 12 of the indexing table body 10 and the upper surface of the cutting feed table body 20 close in height, the cutting feed table can be fixed. It has been found that the expansion width of the pitching appearing on the upper surface of the main body 20 can be reduced.

That is, in the processing table shown in FIG. 4, the upper surface of the first sliding guide shaft 12 has very high straightness, or its straightness is not necessarily perfect. Therefore, the index table 1 causes pitching during index positioning.

The pitching causes a difference between the actual indexing movement amount on the upper surface of the electric slide guide 'IIH12 of the indexing table 1 and the amount measured by the linear scales 31 and 32. The difference is an index positioning error, that is, a pitching error, and influences the index positioning accuracy.

On the other hand, the upper surface of the cutting feed table main body 20 is spaced a distance H from the upper surface of the first sliding guide shaft 12, and the first sliding of the indexing table main body 2o that occurs when the indexing table main body 1o is moved for indexing and positioning. The pitching on the upper surface of the dynamic guide shaft 12 appears enlarged on the upper surface of the cutting feed table main body 20.

That is, the difference between the measured amount by the linear scales 31, 321C and the actual index movement amount of the upper surface of the cutting feed table main body 2o, that is, the pitching error on the upper surface of the cutting feed table main body 20, 1. The pitching error appears larger than the pitching error on the upper surface of the sliding guide shaft 12.

The pitching error on the upper surface of the cutting feed table main body 20 is determined by
If the pitching error on the upper surface of the first sliding guide shaft 12 is much smaller than the above-mentioned tolerance, it will not go out of the range of the above-mentioned tolerance and the special gap M will not occur. However, if the tolerance range is set extremely narrow, the first sliding guide shaft 12 of the splitting table main body 10
Even if the pitching error on the upper surface is much smaller than the above-mentioned tolerance, the pitching error on the upper surface of the cutting feed table body 20 often falls outside the range of the above-mentioned tolerance.

As a result, the above-mentioned II protrusion positioning accuracy cannot be obtained on the upper surface of the cutting feed table main body 20, which poses a practical problem.

As a result of examining the cause of the above-mentioned problem, the inventor found that: (1) the top surface of the cutting feed table body 20 is
0 at the height position from the top surface of the first sliding guide shaft 12
It has become clear that the pitching error on the upper surface of the cutting feed table main body 20 is enlarged as the distance H becomes larger, and reduced as the distance H becomes smaller. That is, the pitching error on the upper surface of the cutting feed table body 20 is caused by the pitching error between the upper surface of the cutting feed table body 20 and the first index table body 10.
By bringing the upper surface of the sliding guide shaft 12 close to each other, the pitching error on the upper surface of the first sliding guide shaft 12 of the indexing table main body 10 can be approximated, and in particular, by making the height positions of the respective upper surfaces coincide with each other, the pitching error can be reduced. It was found that the pitching errors of the two pitching errors are almost the same.

The present invention has been completed based on the above knowledge, and the pitching error on the indexing movement guide surface of the indexing table does not expand and appear on the surface on which the member to be cut and fed is placed. An object of the present invention is to provide a composite table with high accuracy in positioning the mb on a surface on which a member to be cut and fed is placed.

Structure of the Invention The structure of the present invention is such that, in a composite table including an indexing table and a cutting feed table, the indexing movement guide surface of the indexing table and the surface on which the member to be cut and fed is placed are located at a close height position. This is a composite table characterized by arranging a KIl17 output table and a cutting feed table so that the KIl17 output table and the cutting feed table are arranged so that the KIl17 output table and the cutting feed table are arranged so that the KIl17 output table and the cutting feed table are arranged so that the KIl17 output table and the cutting feed table are arranged so that the table KIl17 is removed.

The present invention can achieve the above object by having the configuration as described above.

Example The present invention will be explained in detail by way of examples.

In the embodiment, the present invention is applied to a processing table of an ultra-precision processing device, and the processing table is characterized in that a cutting feed table for placing a workpiece on an indexing table is arranged. be.

, this embodiment will be explained based on the drawings.

FIG. 1 is a schematic front view of this embodiment, and FIG. 2 is a schematic front view of the first embodiment.
FIG.

As shown in the figure, the indexing table 1 includes a pair of first sliding guide shafts 12 . The first sliding guide shaft 12
A sliding bearing member 11. is slidably supported on the sliding bearing member 11. An indexing table main body 10 with a cross-sectional shape supported by the sliding bearing member 11. A female screw member 15 provided at the lower part of the main body 10
．． An index feed screw 14 that is threadedly engaged with the female screw member 15.
Indexing motor 1 that drives the indexing feed screw 14
Consists of 3.

The cutting feed table 2 includes a second sliding guide shaft 22 supported by the indexing table main body 10. A sliding bearing member 21 slidably supported by the second sliding guide shaft 22. A cutting feed table main body 20 supported by the sliding bearing member 21. A female screw member 25 provided at the lower part of the sliding bearing member 21. A cutting feed screw 24 screwed into the female screw member 25. It consists of a cutting feed motor 23 that drives the cutting feed screw 24.

The upper surface of the first sliding guide shaft 12 of the mackerel removal table 1 and the upper surface of the cutting feed table main body 20 are arranged at the same height position. The number 5 is a rotary cutter.

The indexing and positioning device 3 also includes an incremental linear scale 31. having a high resolution of 0.1 μm.
It is equipped with a closed-loop feedback control device 33 with 32 as a detection means, and the first sliding guide shaft 1 of the takeout table 1 is indexed by the scale part 31 of the linear scale 31.32.
A detection section 32 of a linear scale is provided on the body 4, and a linear scale detection section 32 is provided on the sliding bearing member 11 of the indexing table 1 along the upper surface of the indexing table 1. The closed-loop feedback control device 33 controls the operation of the indexing motor 13 in response to a signal from the detection section 32 of the linear scale in accordance with a command from the program control device 6.

The present embodiment is constructed as described above, and the operation of the machining table during machining work is similar to that of the conventional one, but the upper surface of the first sliding guide shaft 12 of the indexing table 1 and the cutting Since the top surface of the feed table main body 20 is arranged at the same height position, the pitching error on the top surface of the first sliding guide shaft 12 of the indexing table 1 is increased on the top surface of the cutting feed table main body 20. never appears.

Therefore, this embodiment can reproduce the indexing positioning accuracy on the upper surface of the first sliding guide shaft of the indexing table on the upper surface of the cutting feed table main body.

In this embodiment, the first sliding guide shaft 12 of the indexing table 1
Since the upper surface is arranged so that the height of the upper surface of the cutting feed table body 20 is the same, the overall height of the processing table is low and the workability of attaching and detaching the workpiece is good.

In the above embodiment, the linear scales 31 and 32 are arranged at the same height as the upper surface of the cutting feed table main body 20, as shown in FIG. It is preferable that the index feed screw 14 is disposed immediately below the index feed screw 14, and further disposed directly above the index feed screw 14. With this configuration, the adverse effect of yawing of the indexing table 1 on the indexing accuracy of the cutting feed table can be minimized. In FIG. 3, the same reference numerals as in FIGS. 1 and 2 indicate the same members. , 16 are support plates that support the scale portion 31 of the linear scale, and are provided on the table body 10 of the indexing table 1.

The detection unit 32 of the linear scale is provided in the aircraft body.

Further, in this embodiment, a machining tool may be disposed on the upper surface of the cutting feed table instead of the workpiece.

Furthermore, the indexing movement guide surface of the indexing table may be a rolling υ guide surface.

Effects of the Invention In the present invention, since the indexing movement guide surface of the indexing table and the surface on which the member to be cut and fed is placed are placed at close height positions, the member to be cut and fed is On the mounting surface, the rate at which pitching errors increase and appear on the indexing movement guide surface of the indexing table is reduced.

In particular, when the respective surfaces are arranged so that the height positions match, the pitching errors on the respective surfaces are almost the same, and the pitching error on the surface on which the member to be cut and fed is placed is , the ab positioning accuracy on the indexing movement guide surface of the indexing table is reproduced.

Knowing the above, the present invention can provide a composite table for the above purpose.

[Brief explanation of the drawing]

FIG. 1 is a front view of an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, FIG. 3 is a plan view showing a modification of the embodiment of the present invention, and FIG. 4 is a conventional This is an example. 1... Index table. 10... Index table body. 12...First sliding guide shaft, 2...Cutting feed table. 20... Cutting feed table body. 22...Second sliding guide shaft, 3...Linear scale. 31...Scale part, 32...Detection part. Figure 2 Figure 3

Claims (1)

[Claims] (1) In a composite table equipped with an indexing table and a cutting feed table, the indexing table and the cutting table are arranged so that the indexing movement guide surface of the indexing table and the surface on which the member to be cut and fed is placed are at close height positions. A composite table characterized by being equipped with a feeding table.