JPS61125170U - - Google Patents
Info
- Publication number
- JPS61125170U JPS61125170U JP15563185U JP15563185U JPS61125170U JP S61125170 U JPS61125170 U JP S61125170U JP 15563185 U JP15563185 U JP 15563185U JP 15563185 U JP15563185 U JP 15563185U JP S61125170 U JPS61125170 U JP S61125170U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate carrier
- chassis
- substantially vertically
- vertically oriented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US65998884A | 1984-10-12 | 1984-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61125170U true JPS61125170U (US07579456-20090825-P00002.png) | 1986-08-06 |
Family
ID=24647654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15563185U Pending JPS61125170U (US07579456-20090825-P00002.png) | 1984-10-12 | 1985-10-11 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0178186B1 (US07579456-20090825-P00002.png) |
| JP (1) | JPS61125170U (US07579456-20090825-P00002.png) |
| DE (1) | DE3579659D1 (US07579456-20090825-P00002.png) |
| HK (1) | HK27191A (US07579456-20090825-P00002.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6453755U (US07579456-20090825-P00002.png) * | 1987-09-30 | 1989-04-03 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5679435A (en) * | 1979-11-30 | 1981-06-30 | Fujitsu Ltd | Rotary evaporation device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2053802A1 (en) * | 1970-11-02 | 1972-05-10 | Licentia Gmbh | Uniform evaporated coatings prodn - esp metal layers for integrated semiconductor circuits etc |
| DE2813180C2 (de) * | 1978-03-25 | 1985-12-19 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom |
| US4284033A (en) * | 1979-10-31 | 1981-08-18 | Rca Corporation | Means to orbit and rotate target wafers supported on planet member |
| JPS5767163A (en) * | 1980-10-09 | 1982-04-23 | Tonan Kinzoku Kogyo Kk | Formation of film for wrist watch band |
| GB2119236A (en) * | 1982-03-26 | 1983-11-16 | Philips Electronic Associated | Magazine and disc holders for supporting discs in the magazine |
-
1985
- 1985-10-11 JP JP15563185U patent/JPS61125170U/ja active Pending
- 1985-10-14 DE DE8585307326T patent/DE3579659D1/de not_active Expired - Lifetime
- 1985-10-14 EP EP19850307326 patent/EP0178186B1/en not_active Expired
-
1991
- 1991-04-11 HK HK27191A patent/HK27191A/xx unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5679435A (en) * | 1979-11-30 | 1981-06-30 | Fujitsu Ltd | Rotary evaporation device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6453755U (US07579456-20090825-P00002.png) * | 1987-09-30 | 1989-04-03 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3579659D1 (de) | 1990-10-18 |
| HK27191A (en) | 1991-04-19 |
| EP0178186A3 (en) | 1987-08-26 |
| EP0178186A2 (en) | 1986-04-16 |
| EP0178186B1 (en) | 1990-09-12 |
