JPS61125169U - - Google Patents
Info
- Publication number
- JPS61125169U JPS61125169U JP653285U JP653285U JPS61125169U JP S61125169 U JPS61125169 U JP S61125169U JP 653285 U JP653285 U JP 653285U JP 653285 U JP653285 U JP 653285U JP S61125169 U JPS61125169 U JP S61125169U
- Authority
- JP
- Japan
- Prior art keywords
- target
- bucking plate
- plate integrated
- bucking
- integrated target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP653285U JPS61125169U (fr) | 1985-01-21 | 1985-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP653285U JPS61125169U (fr) | 1985-01-21 | 1985-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61125169U true JPS61125169U (fr) | 1986-08-06 |
Family
ID=30484061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP653285U Pending JPS61125169U (fr) | 1985-01-21 | 1985-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61125169U (fr) |
-
1985
- 1985-01-21 JP JP653285U patent/JPS61125169U/ja active Pending