JPS61123542U - - Google Patents

Info

Publication number
JPS61123542U
JPS61123542U JP756085U JP756085U JPS61123542U JP S61123542 U JPS61123542 U JP S61123542U JP 756085 U JP756085 U JP 756085U JP 756085 U JP756085 U JP 756085U JP S61123542 U JPS61123542 U JP S61123542U
Authority
JP
Japan
Prior art keywords
wafer substrate
substrate storage
wafer
cassette
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP756085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP756085U priority Critical patent/JPS61123542U/ja
Publication of JPS61123542U publication Critical patent/JPS61123542U/ja
Pending legal-status Critical Current

Links

JP756085U 1985-01-21 1985-01-21 Pending JPS61123542U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP756085U JPS61123542U (US08063081-20111122-C00044.png) 1985-01-21 1985-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP756085U JPS61123542U (US08063081-20111122-C00044.png) 1985-01-21 1985-01-21

Publications (1)

Publication Number Publication Date
JPS61123542U true JPS61123542U (US08063081-20111122-C00044.png) 1986-08-04

Family

ID=30486021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP756085U Pending JPS61123542U (US08063081-20111122-C00044.png) 1985-01-21 1985-01-21

Country Status (1)

Country Link
JP (1) JPS61123542U (US08063081-20111122-C00044.png)

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