JPS61123541U - - Google Patents
Info
- Publication number
- JPS61123541U JPS61123541U JP657585U JP657585U JPS61123541U JP S61123541 U JPS61123541 U JP S61123541U JP 657585 U JP657585 U JP 657585U JP 657585 U JP657585 U JP 657585U JP S61123541 U JPS61123541 U JP S61123541U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- vertical hole
- hole
- bar
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Formation Of Insulating Films (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP657585U JPH0648854Y2 (ja) | 1985-01-21 | 1985-01-21 | ホットプレ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP657585U JPH0648854Y2 (ja) | 1985-01-21 | 1985-01-21 | ホットプレ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61123541U true JPS61123541U (tr) | 1986-08-04 |
| JPH0648854Y2 JPH0648854Y2 (ja) | 1994-12-12 |
Family
ID=30484143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP657585U Expired - Lifetime JPH0648854Y2 (ja) | 1985-01-21 | 1985-01-21 | ホットプレ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648854Y2 (tr) |
-
1985
- 1985-01-21 JP JP657585U patent/JPH0648854Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648854Y2 (ja) | 1994-12-12 |