JPS61123460U - - Google Patents
Info
- Publication number
- JPS61123460U JPS61123460U JP743285U JP743285U JPS61123460U JP S61123460 U JPS61123460 U JP S61123460U JP 743285 U JP743285 U JP 743285U JP 743285 U JP743285 U JP 743285U JP S61123460 U JPS61123460 U JP S61123460U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- holder
- wafer
- injection
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 238000002513 implantation Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims description 4
- 239000007943 implant Substances 0.000 claims description 2
- -1 ion ion Chemical class 0.000 claims description 2
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP743285U JPS61123460U (ko) | 1985-01-22 | 1985-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP743285U JPS61123460U (ko) | 1985-01-22 | 1985-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123460U true JPS61123460U (ko) | 1986-08-04 |
Family
ID=30485783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP743285U Pending JPS61123460U (ko) | 1985-01-22 | 1985-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123460U (ko) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014203713A (ja) * | 2013-04-05 | 2014-10-27 | 日新イオン機器株式会社 | エネルギー線照射システム及びワーク搬送機構 |
| JP2015057789A (ja) * | 2014-11-18 | 2015-03-26 | 日新イオン機器株式会社 | エネルギー線照射システム |
| WO2024116747A1 (ja) * | 2022-12-02 | 2024-06-06 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置およびイオン注入方法 |
-
1985
- 1985-01-22 JP JP743285U patent/JPS61123460U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014203713A (ja) * | 2013-04-05 | 2014-10-27 | 日新イオン機器株式会社 | エネルギー線照射システム及びワーク搬送機構 |
| JP2015057789A (ja) * | 2014-11-18 | 2015-03-26 | 日新イオン機器株式会社 | エネルギー線照射システム |
| WO2024116747A1 (ja) * | 2022-12-02 | 2024-06-06 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置およびイオン注入方法 |