JPS61121739U - - Google Patents

Info

Publication number
JPS61121739U
JPS61121739U JP337685U JP337685U JPS61121739U JP S61121739 U JPS61121739 U JP S61121739U JP 337685 U JP337685 U JP 337685U JP 337685 U JP337685 U JP 337685U JP S61121739 U JPS61121739 U JP S61121739U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
jig
grooves
jig body
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP337685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP337685U priority Critical patent/JPS61121739U/ja
Publication of JPS61121739U publication Critical patent/JPS61121739U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Packaging Frangible Articles (AREA)
JP337685U 1985-01-14 1985-01-14 Pending JPS61121739U (US07579456-20090825-P00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP337685U JPS61121739U (US07579456-20090825-P00002.png) 1985-01-14 1985-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP337685U JPS61121739U (US07579456-20090825-P00002.png) 1985-01-14 1985-01-14

Publications (1)

Publication Number Publication Date
JPS61121739U true JPS61121739U (US07579456-20090825-P00002.png) 1986-07-31

Family

ID=30477944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP337685U Pending JPS61121739U (US07579456-20090825-P00002.png) 1985-01-14 1985-01-14

Country Status (1)

Country Link
JP (1) JPS61121739U (US07579456-20090825-P00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015173171A (ja) * 2014-03-11 2015-10-01 セイコーインスツル株式会社 ウェハキャリア及びウェハキャリアからウェハを取り出す方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015173171A (ja) * 2014-03-11 2015-10-01 セイコーインスツル株式会社 ウェハキャリア及びウェハキャリアからウェハを取り出す方法

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