JPS61121737U - - Google Patents

Info

Publication number
JPS61121737U
JPS61121737U JP564385U JP564385U JPS61121737U JP S61121737 U JPS61121737 U JP S61121737U JP 564385 U JP564385 U JP 564385U JP 564385 U JP564385 U JP 564385U JP S61121737 U JPS61121737 U JP S61121737U
Authority
JP
Japan
Prior art keywords
extension tube
diffusion
nozzle
tube
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP564385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0737309Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985005643U priority Critical patent/JPH0737309Y2/ja
Publication of JPS61121737U publication Critical patent/JPS61121737U/ja
Application granted granted Critical
Publication of JPH0737309Y2 publication Critical patent/JPH0737309Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP1985005643U 1985-01-18 1985-01-18 拡散炉 Expired - Lifetime JPH0737309Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985005643U JPH0737309Y2 (ja) 1985-01-18 1985-01-18 拡散炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985005643U JPH0737309Y2 (ja) 1985-01-18 1985-01-18 拡散炉

Publications (2)

Publication Number Publication Date
JPS61121737U true JPS61121737U (US20030157376A1-20030821-M00001.png) 1986-07-31
JPH0737309Y2 JPH0737309Y2 (ja) 1995-08-23

Family

ID=30482335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985005643U Expired - Lifetime JPH0737309Y2 (ja) 1985-01-18 1985-01-18 拡散炉

Country Status (1)

Country Link
JP (1) JPH0737309Y2 (US20030157376A1-20030821-M00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269932A (ja) * 1988-09-05 1990-03-08 Hitachi Ltd 半導体ウェハの熱処理装置、及び熱処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106119A (en) * 1980-12-24 1982-07-01 Hitachi Ltd Heating furnace

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106119A (en) * 1980-12-24 1982-07-01 Hitachi Ltd Heating furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269932A (ja) * 1988-09-05 1990-03-08 Hitachi Ltd 半導体ウェハの熱処理装置、及び熱処理方法

Also Published As

Publication number Publication date
JPH0737309Y2 (ja) 1995-08-23

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