JPS61121331U - - Google Patents
Info
- Publication number
- JPS61121331U JPS61121331U JP281385U JP281385U JPS61121331U JP S61121331 U JPS61121331 U JP S61121331U JP 281385 U JP281385 U JP 281385U JP 281385 U JP281385 U JP 281385U JP S61121331 U JPS61121331 U JP S61121331U
- Authority
- JP
- Japan
- Prior art keywords
- ash
- hand hole
- treatment device
- vacuum type
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP281385U JPS61121331U (en, 2012) | 1985-01-16 | 1985-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP281385U JPS61121331U (en, 2012) | 1985-01-16 | 1985-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61121331U true JPS61121331U (en, 2012) | 1986-07-31 |
Family
ID=30476841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP281385U Pending JPS61121331U (en, 2012) | 1985-01-16 | 1985-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61121331U (en, 2012) |
-
1985
- 1985-01-16 JP JP281385U patent/JPS61121331U/ja active Pending