JPS61121331U - - Google Patents

Info

Publication number
JPS61121331U
JPS61121331U JP281385U JP281385U JPS61121331U JP S61121331 U JPS61121331 U JP S61121331U JP 281385 U JP281385 U JP 281385U JP 281385 U JP281385 U JP 281385U JP S61121331 U JPS61121331 U JP S61121331U
Authority
JP
Japan
Prior art keywords
ash
hand hole
treatment device
vacuum type
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP281385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP281385U priority Critical patent/JPS61121331U/ja
Publication of JPS61121331U publication Critical patent/JPS61121331U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP281385U 1985-01-16 1985-01-16 Pending JPS61121331U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP281385U JPS61121331U (enrdf_load_stackoverflow) 1985-01-16 1985-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP281385U JPS61121331U (enrdf_load_stackoverflow) 1985-01-16 1985-01-16

Publications (1)

Publication Number Publication Date
JPS61121331U true JPS61121331U (enrdf_load_stackoverflow) 1986-07-31

Family

ID=30476841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP281385U Pending JPS61121331U (enrdf_load_stackoverflow) 1985-01-16 1985-01-16

Country Status (1)

Country Link
JP (1) JPS61121331U (enrdf_load_stackoverflow)

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