JPS61120758U - - Google Patents
Info
- Publication number
- JPS61120758U JPS61120758U JP402085U JP402085U JPS61120758U JP S61120758 U JPS61120758 U JP S61120758U JP 402085 U JP402085 U JP 402085U JP 402085 U JP402085 U JP 402085U JP S61120758 U JPS61120758 U JP S61120758U
- Authority
- JP
- Japan
- Prior art keywords
- target
- packing plate
- view
- utility
- integrally formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012856 packing Methods 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP402085U JPS61120758U (en18) | 1985-01-16 | 1985-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP402085U JPS61120758U (en18) | 1985-01-16 | 1985-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61120758U true JPS61120758U (en18) | 1986-07-30 |
Family
ID=30479190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP402085U Pending JPS61120758U (en18) | 1985-01-16 | 1985-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120758U (en18) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006503984A (ja) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
| USRE41266E1 (en) | 1990-09-18 | 2010-04-27 | Lam Research Corporation | Composite electrode for plasma processes |
-
1985
- 1985-01-16 JP JP402085U patent/JPS61120758U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE41266E1 (en) | 1990-09-18 | 2010-04-27 | Lam Research Corporation | Composite electrode for plasma processes |
| JP2006503984A (ja) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
| JP2011052325A (ja) * | 2002-10-24 | 2011-03-17 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
| JP2014051746A (ja) * | 2002-10-24 | 2014-03-20 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |