JPS61120757U - - Google Patents
Info
- Publication number
- JPS61120757U JPS61120757U JP346885U JP346885U JPS61120757U JP S61120757 U JPS61120757 U JP S61120757U JP 346885 U JP346885 U JP 346885U JP 346885 U JP346885 U JP 346885U JP S61120757 U JPS61120757 U JP S61120757U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- evaporation
- wafer
- disk
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP346885U JPS61120757U (cs) | 1985-01-14 | 1985-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP346885U JPS61120757U (cs) | 1985-01-14 | 1985-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61120757U true JPS61120757U (cs) | 1986-07-30 |
Family
ID=30478124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP346885U Pending JPS61120757U (cs) | 1985-01-14 | 1985-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120757U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005066385A1 (ja) * | 2004-01-06 | 2005-07-21 | Ideal Star Inc. | イオン注入方法、及び、イオン注入装置 |
-
1985
- 1985-01-14 JP JP346885U patent/JPS61120757U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005066385A1 (ja) * | 2004-01-06 | 2005-07-21 | Ideal Star Inc. | イオン注入方法、及び、イオン注入装置 |
| JP4769083B2 (ja) * | 2004-01-06 | 2011-09-07 | 株式会社イデアルスター | イオン注入方法、及び、イオン注入装置 |