JPS61119364U - - Google Patents

Info

Publication number

JPS61119364U

JPS61119364U JP120285U JP120285U JPS61119364U JP S61119364 U JPS61119364 U JP S61119364U JP 120285 U JP120285 U JP 120285U JP 120285 U JP120285 U JP 120285U JP S61119364 U JPS61119364 U JP S61119364U

Authority

JP

Japan

Prior art keywords

insulating film

semiconductor

region

semiconductor base

exposed

Prior art date

1985-01-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims 4
• OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
• 239000011521 glass Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1