JPS61118952A - Device for producing scanning images - Google Patents

Abstract

PURPOSE:To alleviate the deterioration of the sample caused by scanning lines by generating a signal from an image memory so that scanning lines are prevented from being irradiated upon the sample after the image memory completes storing a given number of pictures. CONSTITUTION:Radiated X-rays are transmitted by a sample 8 and then converted into an electric signal by means of a scintillator 10. The electric signal is then supplied to a displayer 13 through an amplifier 15 and is displayed as an image on the displayer 13. When a memory 14 completes storing the image of one picture, the memory 14 generates a signal which causes an excitation power supply 12 to energize a coil 11 for producing a magnetic field. As the result, the electron rays are deflected as indicated by the broken line and then are interrupted by a disphragm 14. Since it is adequate for electron rays to be irradiated upon the target for a short time, the temperature of the target is not increased and the thermal deterioration of the sample 8 close to the target is alleviated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a scanning image forming apparatus, and more particularly to an image storage device suitable for reducing sample damage caused by scanning lines.

[Background of the invention]

The attached document is a detailed catalog of the Nishi product name Luzetskus (500). This device is widely used in optical microscopes, scanning electron microscopes, etc. These two devices, which are processing devices equipped with image storage devices, have various functions, but in both cases, emphasis has been placed on processing the stored images, and no consideration has been given to processing the original signals.

[Purpose of the invention]

In an apparatus that forms an image by scanning a particle beam, radiation, etc. over a sample surface, damage to the sample caused by the particle beam, etc., such as thermal effects, radiation damage, stains, etc. can occur. The present invention includes a storage device and means for preventing these particle beams from being irradiated onto the sample when one screen has been formed.

[Summary of the invention]

In the scanning image forming apparatus, living things and organic matter.

There are some lifting platforms that are very weak in terms of heat. In addition, long-term irradiation such as charge-up with accelerated particle beams may increase the effects, making it impossible to observe normal images or measure dimensions. In the present invention, one screen or a required number of images are superimposed on a storage device to form an image, and then the scanning line is blocked by a signal from the storage device to minimize damage to the sample.

[Embodiments of the invention]

FIG. 1 shows an embodiment of a scanning X-ray microscope. Electrons are emitted from the filament 1, focused by the Wehnelt cylinder 2, accelerated by the anode 3, passed through the small hole of the diaphragm 4, passed through the objective lens 5, and form a strong dot-shaped electron beam on the target 7. imaged. The electron beam is surface-scanned over the target by the scanning coil 6, and the emitted X-rays are transmitted through the sample 8, converted into electrical signals by the scintillator 10, and then transmitted to the display device 13 via the amplifier 15 to be observed and photographed as an image. be done. 14 is a storage device for surface images, and the image once stored is T.
It can be observed as a V image at any time on a cathode ray tube display. When the image of one screen has been memorized, the device 14 issues a signal, the excitation power source 12 energizes the coil 11 for generating a magnetic field, deflects it as shown by the dotted line in the figure, and shuts it off by the diaphragm 4. do. Since irradiation of the electron beam onto the target takes only a short time, the temperature of the target does not rise, and thermal damage and X-ray damage to the sample that approaches the target are reduced.

FIG. 2 shows an embodiment applied to a scanning electron microscope. The electron beam focused by the condenser lens 16 is scanned across the surface of the sample 8. After the image is stored, it is stored in storage device 1.
The solenoid coil is energized by the signal No. 4, and the aperture directly connected to the plunger 17 is moved to block the electron beam.

From the viewpoint of the purpose, the best number of times to memorize an image is - times, but
Depending on the degree of damage to the sample, it may be considered to superimpose multiple images. For example, if a sample is stained by an electron beam, no actual damage may occur after 4 to 5 irradiations, and a completion signal may be issued after a required number of images have been accumulated.

〔Effect of the invention〕

According to the present invention, since the scanning dose to the sample can be kept to a minimum, damage to the sample due to thermal damage, radiation damage, contamination, charge-up, etc. can be reduced.

] It's large.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of an embodiment for an X-ray scanning microscope, and FIG. 2 is an explanatory diagram of an embodiment for a scanning electron microscope. DESCRIPTION OF SYMBOLS 1... Filament, 4... Aperture, 5... Objective lens, 7... Target, 8... Sample, 10...
Detector, 13...Display, 14...Storage device, 12...Excitation power supply, 11...Magnetic field generation coil, 1
7...Solenoid, 18...Plunger.

Claims (1)

[Claims] 1. A device for obtaining an image by scanning with particle beams, light beams, X-rays, etc., is equipped with an image storage device, and has means for emitting a signal after storing the required number of screens, thereby:
A scanning image forming apparatus characterized in that irradiation of the scanning line to the sample is blocked.