JPS61118657U - - Google Patents
Info
- Publication number
- JPS61118657U JPS61118657U JP124385U JP124385U JPS61118657U JP S61118657 U JPS61118657 U JP S61118657U JP 124385 U JP124385 U JP 124385U JP 124385 U JP124385 U JP 124385U JP S61118657 U JPS61118657 U JP S61118657U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- rotation
- semiconductor wafer
- wafer
- centrifugal dehydrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000018044 dehydration Effects 0.000 claims description 2
- 238000006297 dehydration reaction Methods 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims 1
Landscapes
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP124385U JPS61118657U (no) | 1985-01-09 | 1985-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP124385U JPS61118657U (no) | 1985-01-09 | 1985-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61118657U true JPS61118657U (no) | 1986-07-26 |
Family
ID=30473811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP124385U Pending JPS61118657U (no) | 1985-01-09 | 1985-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61118657U (no) |
-
1985
- 1985-01-09 JP JP124385U patent/JPS61118657U/ja active Pending