JPS61118636U - - Google Patents
Info
- Publication number
- JPS61118636U JPS61118636U JP198585U JP198585U JPS61118636U JP S61118636 U JPS61118636 U JP S61118636U JP 198585 U JP198585 U JP 198585U JP 198585 U JP198585 U JP 198585U JP S61118636 U JPS61118636 U JP S61118636U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- wire
- arm
- guide plate
- inner diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP198585U JPH0513396Y2 (enExample) | 1985-01-11 | 1985-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP198585U JPH0513396Y2 (enExample) | 1985-01-11 | 1985-01-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61118636U true JPS61118636U (enExample) | 1986-07-26 |
| JPH0513396Y2 JPH0513396Y2 (enExample) | 1993-04-08 |
Family
ID=30475234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP198585U Expired - Lifetime JPH0513396Y2 (enExample) | 1985-01-11 | 1985-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513396Y2 (enExample) |
-
1985
- 1985-01-11 JP JP198585U patent/JPH0513396Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513396Y2 (enExample) | 1993-04-08 |