JPS61118077U - - Google Patents

Info

Publication number
JPS61118077U
JPS61118077U JP120685U JP120685U JPS61118077U JP S61118077 U JPS61118077 U JP S61118077U JP 120685 U JP120685 U JP 120685U JP 120685 U JP120685 U JP 120685U JP S61118077 U JPS61118077 U JP S61118077U
Authority
JP
Japan
Prior art keywords
low temperature
thermocouple
temperature measurement
jig
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP120685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP120685U priority Critical patent/JPS61118077U/ja
Publication of JPS61118077U publication Critical patent/JPS61118077U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP120685U 1985-01-09 1985-01-09 Pending JPS61118077U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP120685U JPS61118077U (enExample) 1985-01-09 1985-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP120685U JPS61118077U (enExample) 1985-01-09 1985-01-09

Publications (1)

Publication Number Publication Date
JPS61118077U true JPS61118077U (enExample) 1986-07-25

Family

ID=30473742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP120685U Pending JPS61118077U (enExample) 1985-01-09 1985-01-09

Country Status (1)

Country Link
JP (1) JPS61118077U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003031884A (ja) * 2001-07-18 2003-01-31 Fujitsu Quantum Devices Ltd 半導体モジュールの温度制御装置及び温度制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003031884A (ja) * 2001-07-18 2003-01-31 Fujitsu Quantum Devices Ltd 半導体モジュールの温度制御装置及び温度制御方法

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