JPS61117254U - - Google Patents

Info

Publication number
JPS61117254U
JPS61117254U JP9585U JP9585U JPS61117254U JP S61117254 U JPS61117254 U JP S61117254U JP 9585 U JP9585 U JP 9585U JP 9585 U JP9585 U JP 9585U JP S61117254 U JPS61117254 U JP S61117254U
Authority
JP
Japan
Prior art keywords
storage box
predetermined direction
wafer storage
holding arm
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9585U priority Critical patent/JPS61117254U/ja
Publication of JPS61117254U publication Critical patent/JPS61117254U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Discharge By Other Means (AREA)
JP9585U 1985-01-07 1985-01-07 Pending JPS61117254U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9585U JPS61117254U (ko) 1985-01-07 1985-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9585U JPS61117254U (ko) 1985-01-07 1985-01-07

Publications (1)

Publication Number Publication Date
JPS61117254U true JPS61117254U (ko) 1986-07-24

Family

ID=30471664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9585U Pending JPS61117254U (ko) 1985-01-07 1985-01-07

Country Status (1)

Country Link
JP (1) JPS61117254U (ko)

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