JPS61117246U - - Google Patents
Info
- Publication number
- JPS61117246U JPS61117246U JP20195584U JP20195584U JPS61117246U JP S61117246 U JPS61117246 U JP S61117246U JP 20195584 U JP20195584 U JP 20195584U JP 20195584 U JP20195584 U JP 20195584U JP S61117246 U JPS61117246 U JP S61117246U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- inner ring
- bowl
- gap
- washing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20195584U JPS61117246U ( ) | 1984-12-29 | 1984-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20195584U JPS61117246U ( ) | 1984-12-29 | 1984-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61117246U true JPS61117246U ( ) | 1986-07-24 |
Family
ID=30764225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20195584U Pending JPS61117246U ( ) | 1984-12-29 | 1984-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117246U ( ) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142919A (ja) * | 1984-08-01 | 1986-03-01 | エフエスアイ コーポレイシヨン | 基板処理機のためのラビリンスシール |
-
1984
- 1984-12-29 JP JP20195584U patent/JPS61117246U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142919A (ja) * | 1984-08-01 | 1986-03-01 | エフエスアイ コーポレイシヨン | 基板処理機のためのラビリンスシール |