JPS61116282U - - Google Patents
Info
- Publication number
- JPS61116282U JPS61116282U JP9285U JP9285U JPS61116282U JP S61116282 U JPS61116282 U JP S61116282U JP 9285 U JP9285 U JP 9285U JP 9285 U JP9285 U JP 9285U JP S61116282 U JPS61116282 U JP S61116282U
- Authority
- JP
- Japan
- Prior art keywords
- inner tube
- flexible
- tube
- heater
- located outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Pipe Accessories (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985000092U JPH0349355Y2 (enExample) | 1985-01-07 | 1985-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985000092U JPH0349355Y2 (enExample) | 1985-01-07 | 1985-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116282U true JPS61116282U (enExample) | 1986-07-22 |
| JPH0349355Y2 JPH0349355Y2 (enExample) | 1991-10-22 |
Family
ID=30471658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985000092U Expired JPH0349355Y2 (enExample) | 1985-01-07 | 1985-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0349355Y2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102979985A (zh) * | 2012-11-30 | 2013-03-20 | 大连隆星新材料有限公司 | 一种可控温输送管 |
| US11198935B2 (en) | 2015-10-16 | 2021-12-14 | Kokusai Electric Corporation | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5954293U (ja) * | 1982-10-04 | 1984-04-09 | 三菱重工業株式会社 | フレキシブルチユ−ブ |
-
1985
- 1985-01-07 JP JP1985000092U patent/JPH0349355Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5954293U (ja) * | 1982-10-04 | 1984-04-09 | 三菱重工業株式会社 | フレキシブルチユ−ブ |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102979985A (zh) * | 2012-11-30 | 2013-03-20 | 大连隆星新材料有限公司 | 一种可控温输送管 |
| US11198935B2 (en) | 2015-10-16 | 2021-12-14 | Kokusai Electric Corporation | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0349355Y2 (enExample) | 1991-10-22 |