JPS61115550U - - Google Patents
Info
- Publication number
- JPS61115550U JPS61115550U JP19735484U JP19735484U JPS61115550U JP S61115550 U JPS61115550 U JP S61115550U JP 19735484 U JP19735484 U JP 19735484U JP 19735484 U JP19735484 U JP 19735484U JP S61115550 U JPS61115550 U JP S61115550U
- Authority
- JP
- Japan
- Prior art keywords
- vaporization chamber
- tank
- chemical
- chemical solution
- solution tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008016 vaporization Effects 0.000 claims description 14
- 238000009834 vaporization Methods 0.000 claims description 14
- 239000000126 substance Substances 0.000 claims description 12
- 230000001877 deodorizing effect Effects 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19735484U JPH0140525Y2 (el) | 1984-12-31 | 1984-12-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19735484U JPH0140525Y2 (el) | 1984-12-31 | 1984-12-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61115550U true JPS61115550U (el) | 1986-07-21 |
JPH0140525Y2 JPH0140525Y2 (el) | 1989-12-04 |
Family
ID=30755603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19735484U Expired JPH0140525Y2 (el) | 1984-12-31 | 1984-12-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0140525Y2 (el) |
-
1984
- 1984-12-31 JP JP19735484U patent/JPH0140525Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0140525Y2 (el) | 1989-12-04 |