JPS61115541A - Vacuum x-ray ct apparatus - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a vacuum X-ray CT' apparatus (hereinafter referred to as a tomographic method) that obtains an X-ray tomography (hereinafter referred to as a tomography) of a cross section of an object to be inspected.

[Technical background of the invention and its problems]

Conventionally, this type of X-ray CT apparatus (2) used an X-ray tube in which the anode and cathode for generating X-rays were sealed in a vacuum container as an X-ray source, so generation point a: If you want to get close to the X-ray generation point of the anode, the shortest distance between the X-ray generation point of the anode and the outer wall of the vacuum container is the limit that you can approach, and you cannot get any closer. When obtaining transmission data, it has been necessary to bring the X-ray generation point and the object to be inspected close to each other because it is impossible to obtain data with a resolution higher than that of the X-ray generator.

[Purpose of the invention]

It is an object of the present invention to provide a pure nitrogen X-ray CT apparatus that can be brought as close as possible to the X-ray generating point to be inspected and has a sufficiently high resolution.

[Summary of the invention]

The present invention comprises an X-ray generation cathode that outputs an electron beam for generating X-rays, and an X-ray generation anode that receives the magneton beam output from this cathode and generates X-rays. An X-ray generating means for irradiating X-rays onto an object to be inspected, which is installed nearby; an X-ray detection means for collimating and detecting a planar beam of a predetermined thickness including the X-ray generation point of the ray-generating anode; a small moving means for rotating the detection means and the object to be inspected relative to each other (twice); and an X-ray image for processing the X-ray transmission data obtained from the X-ray detection means to obtain a tomographic image of the object to be inspected. A vacuum X-ray C processing means, characterized in that at least the X-ray generating anode and cathode and the object to be inspected are housed in one vacuum-sealed area.
The T device was realized and the intended purpose was achieved.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1(a) shows a vacuum X-ray CT apparatus according to an embodiment of the present invention.

(b), ' Shown in (c). In the diagram! 1) is an X-ray generation cathode (
The anode (hereinafter referred to as anode) is a thermal electrode made of a tungsten wire coil. (2) is an X-ray generating anode (hereinafter referred to as an anode) that receives the electron beam output from the cathode (1) and generates X-rays, and is made of chromium, copper, tungsten, or the like. The anode (2) is cylindrical, and the collar (2a) at one end connects the main body case G.
υ mounting seat 01: Abuts from the inside of the main body case via a backing (toward) and is airtightly mounted. (2b
) is the hole through which the electron beam passes, and (2C) is the generated X
It is an exit hole with a divergent angle that serves as the exit of the wire. Also,
The outer surface of the columnar part of the anode (2) has 6 holes (2c) for emitting light.
All but one part are covered with a shield (3) made of lead. On the other hand, the cathode (1) is a ceramic cylinder (4) whose one end is hermetically and concentrically fixed to the anode (2).
5) (Two are attached. Then, the cathode (1) and the anode (
2) is connected to a high voltage generator (6) that generates a high voltage for accelerating the electron beam and a cathode power source (7) for heating the cathode (1). The above cathode (1), anode (2), high voltage generator (6), cathode power source (7), etc.
The line generating means constitutes the prisoner.

αυ is a non-metallic cap, and the flange (lla) formed at the base is joined to the flange (b) of the main body case 0υ via the backing field, and the main body case c31)
The flange c34) is tightened and airtightly sealed by one-touch fasteners C provided at multiple locations.

The emission hole (2c) of the anode (2) of the cap circle is provided with an irradiation window (l side) made of beryllium. A sample stand is provided inside the housing, located below the exit path of the X-rays from the anode (2).The sample stand u3 is
A sample mounting plate on which the object to be inspected (S) is placed, a vertical fine movement mechanism provided on the sample mounting plate support shaft a1, and a bearing stand supporting the sample mounting plate support@α9 with bearings. The structure is equipped with a base (II) equipped with a forward and backward fine movement mechanism that slightly moves the bearing surface in the direction of the X-ray emission center line.

A disc-shaped magnet (II) is fixed to the lower end of the sample mounting plate support shaft (I!9 in the drawing) in close proximity to the wall/surface of the cap.

Further, the cap αl)C is provided with an exhaust pipe (not shown) with a cock for evacuating the inside of the cap.

Furthermore, the top part (2) of the cap Uυ is provided with a heat radiator (2v) having a plurality of heat radiating fins 123. It appears inside I.

Therefore, the end face of the base of the heat sink Qυ comes into contact with the lead shield (3) covering the anode (2) when the cap housing is attached, and the heat spreader uD contacts the anode (2). The heat conducted from the inside through the shield (3) is carried and radiated to the outside through the heat dissipation fins. Note that the means for cooling the anode (2) is not limited to the above-mentioned air cooling method using the heat sink υ;
A cooling circulation pipe is provided that is placed in contact with the anode (2), and a cooling fluid such as cooling water is passed through the pipe (;
may be cooled.

Cylindrical body (4) containing cathode (1), high pressure generator (6)
As shown in FIG. 1(b), the main body case 01) housing the cathode power source (7) is supported by a whole support stand c37) provided integrally at its lower part. Then, a pulse motor (to), which has a disc-shaped magnet (to) fixed to the tip of the rotating shaft and two magnets (a9+) of the sample stage α in the cap (11), controls the pace Ql of the sample stage. It is installed on a pace (overall support stand t3? via 40) equipped with a longitudinal fine movement mechanism having the same fine movement direction as the longitudinal fine movement mechanism.

Magnet 4 and magnet (2) constitute a magnetic coupling, and the step rotation of the pulse motor (to) is transmitted to the sample mounting plate support axis aI of sample stage 0. The sample stage α3 and the pulse motor constitute a driving means. The right end of the main body case Oυ in the drawing is hermetically sealed with a lid (31a), and the internal space is filled with an insulating gas IF.

14υ is an X-ray detector placed directly facing the X-ray beam from the anode (2) and spaced a predetermined distance from the anode, and is mounted and fixed on a pedestal (not shown). X-ray detector 14
D is composed of an arc-shaped detector row in which a plurality of single detectors are arranged at the same distance from the X-ray generation point of the anode (2), and the emitted X-ray beam is It has an arc length that spans an angular range in which at least all of the X-rays that have passed through the object to be inspected (8) are incident. 03 is a collimator, and the X-ray detector (4D front side (= support member not shown)
2, the X-ray beam emitted from the anode (2) is made into a thin fan-shaped beam (nicolimate) with a horizontal beam surface and incident on the X-ray detector (40). It consists of a single detector 1B shaped like a box, and a thin fan beam (
This is when the X-ray beam passes through the horizontal slice plane passing through the center of the object (2 is the object to be inspected @) when the object to be inspected is set up as shown in Figure 1 (b) (2 is the object to be inspected @). ) are distributed and input to each single detector α. The X-rays emitted from each single detector G11l have different lengths of transmission paths when passing through the object to be inspected (8), so the degree of absorption by the object to be inspected is different, and therefore the X-rays Different strengths. Each individual detector (43 collects electrons ionized by incident X-rays through an electrode (;) and outputs a current proportional to the intensity of the incident X-rays. It constitutes the detection means (C).

An X-ray image defect processing means (Φ) for processing the X-ray transmission data obtained from the X-ray detection means to obtain a tomographic image of the object to be inspected, and the above-mentioned X-ray generation means (4) and driving means).

A computer (6
) is constructed as shown in FIG. 1(c)l2.

FIG. 1(C) (as shown in 2, X-ray image processing means 0) includes a data acquisition device (51), an image preprocessing device (52)
, image reconstruction device (5, () , tomographic image display device (5)
4) It is composed of ℃. The data collection device (51) is
An image preprocessing device (52) collects data obtained by the X-ray detector (4I) of the X-ray detection means (Q). Performs data preprocessing such as sensitivity correction, data logarithmic transformation, and bias correction.Image reconstruction device (58)
performs image reconstruction using the preprocessed data as an X-ray tomographic conduit. The tomographic image display device (54) is a computer that displays a tomographic image based on image data from the image reconstruction device (58), and includes an X-ray generating means (1), a driving means (B),
This is a computer that controls each part of the X-ray detection means (Q), data acquisition device (51), image preprocessing device (52), image reconstruction device (58), and tomographic image display device (54).

Next, the vacuum X of one embodiment of the present invention configured as described above will be explained.
The operation of the X-ray CT device will be explained.

First, the cap (11) is removed from the main body case Gυ, the object to be inspected (8) is fixed to the sample mounting plate α4C, and the slice plane of the object to be inspected (+9) is determined by tilting the vertical fine movement mechanism. Next (2. Move the bearing stand αη from the base α barrel back and forth fine movement mechanism (2) to set the distance between the inspection object (S) and the X-ray generation point using the base stand (11 scales. At the same time, the main body case 0
1) Overall support base 0? ) pace (Align the scale of the 4G longitudinal fine movement mechanism and align the rotation axis of the pulse motor (to) with the axis of the sample stage (1st floor).Next, attach the C cap (Ll) to the main body case, one-touch type. Tighten with the tightening tool (to). Then, exhaust the air with a vacuum pump through the exhaust pipe holder with a cock, and the inside of the cap (11) and the cylinder body (4) are evacuated.
Bring the sealed space inside to the specified degree of vacuum.

This device (in the second case, the object to be inspected (S) on the sample stage (13)
) is rotated 36° and illuminated with an X-ray beam from all around.

Then, during the 36° rotation, X-ray transmission data is collected at 300 or 500 sampling points.

That is, the pulse motor (of the driving means) is caused to perform a computational operation.

Emission of an X-ray beam by the X-ray generation means (1) and data collection by the data collection device (51) are carried out by emitting X-rays in a pulsed manner at each sampling point, and detecting the X-rays in synchronization with this. Collect the transmission data obtained by the instrument (Shun) with the data acquisition device (51), or use the X-ray
One of the methods is to emit the beam continuously during the 6o° rotation and collect the transmission data with the data acquisition device (51) at each sample point using the CX-ray detector (0υ).
It is controlled by two computers.

The data acquisition device (5 It is integrated over two times, then converted into ADfi and sent to the computer. This digitized data
Once stored in the storage device of the computer, the image preprocessor (52) then performs sensitivity correction of the single detector, logarithmic transformation of the data, and bias correction.

Image preprocessing device (52) (2) The data preprocessed by the image preprocessing device (52) is
It is a quantity proportional to the integral value over the line transmission path,
In the image reconstruction device (58), a known painter reconstruction method (for example, 08P No. 4149247) is used! -Thus, the image is reconstructed, and data proportional to the X-ray absorption coefficient of each part of the slice plane of the inspected object @) is obtained, and this data C
: Based on this, an image signal representing the slice plane as a tomographic image based on gradation differences or color differences is sent to a tomographic image display device (54) (2), and a tomographic image of the object to be inspected e is displayed.

After measuring one slice surface, return the inside of the cap (Iυ to atmospheric pressure), remove the Yayapp (11), and move the specimen (19) up and down from the vertical fine movement mechanism αQ (2) of the sample stage (13). Set the slice plane.After that, cap α
The next measurement operation (two people can do it) simply attaches the υ to the main body case Gl) and evacuates the inside of the cap.

In the vacuum X-ray CT apparatus of this embodiment, the sample stage 0 is provided within the cap (1υ), and the object to be inspected (S) and the anode (2) are
By housing the cathode (1) and the cathode (1) in one vacuum-sealed area, the object to be inspected (S) can be brought very close to the X-ray generation point of the anode (2), and the resolution can be sufficiently increased. Yes, if you explain the reason with a diagram,
Figure 2 (=As shown, the width of the single detector u21 of the X-ray detector (41) is Δd, the distance from the X-ray generation point (0) is 1, and the distance from the X-ray generation point) to the object to be inspected The distance to (8) is r
When , the resolution that can be detected on the object to be inspected is -・△d, and it is clear that by reducing r (resolution 14 mm can be obtained from 2). Since the base 0I is equipped with a forward and backward fine movement mechanism, it is possible to easily and accurately set the distance between the object to be inspected (@) and the X-ray generation point.In addition, the slice plane of the object to be inspected (S) can be set easily and accurately. The provision of a vertical fine movement mechanism (tl) on the stand 011 (tl) makes it easier and more accurate to carry out the test. α-Chin has a structure in which it is tightened with a one-touch fastener (because it can be easily attached and detached, so it is easy to replace the object to be inspected) and to easily set the position as described above.

In addition, the flange (2a side) of the anode (2) is in contact with the mounting seat a2 of the main body case 0υ from the inside of the main body case via the backing (toward) to maintain airtightness, so the cap is When the vacuum is applied, the flange (2a) is attached to the mounting seat (
33i=The sealing function is high because it is tightened by the pressure difference with the insulating gas inside the main case 0υ. Even if the pressure increases due to a rise in the temperature of the insulating gas, there is no problem because it is easy to tighten.

In the above embodiment, the high voltage generator (6) and the cathode power source (7) are housed in the main body case G1), but the high voltage generator (6) and the cathode power source (7)
) may be connected externally to the cathode (1) and anode (2) by cables.

Further, as shown in FIG. 3 (2), the collimator (43) may be attached to the outside of the irradiation window α2 of the cap (11).

In addition, if the resolution is not so strictly required, the fourth
As shown in Figure 2, the collimator (43) is capped (11
In addition to the outside of the irradiation window @ (2) of the collimator (43), the X-ray detector I may also be installed. ) is eliminated.

In addition, in the embodiments shown in Figures 1(a), (b), and (C), the sample stage was attached to the cap aυ, but as shown in Figures 5(a) and (b), (2
) - A double-shaped support arm (61) is provided, and the sample mounting plate support shaft (l) is supported by a magnetic bearing (62) provided at the tip of the support arm (61). The magnetic bearing (62) has flanged cylindrical magnets (64) at the upper and lower parts of the bearing hole (68) of the support 1!lit (61), respectively, as shown in FIG. 6(b) (2). ), and attach a flanged cylindrical magnet (66) to the flanges (65) provided above and below the part that penetrates the bearing hole (68) (for I!9C). Each is fixed to the support arm (61
) side magnets (64), respectively. A non-contact magnetic bearing (62) is constructed by arranging the magnet (64) and the magnet (66) to face each other with the same polarity. Non-contact magnetic bearing (62) The anode (
2) is prevented from being transmitted to the sample stage (13).

Although not shown, the horizontal portion of the support arm (61) (a two-front fine movement mechanism is incorporated therein).

Next (2) Another embodiment of the vacuum X-ray CT apparatus according to the present invention will be explained with reference to FIG. 6. In the figure, (1) is a cathode, (2
) is the anode, and one Pelger (1) in the vacuum container (101)
02) are arranged in a predetermined positional relationship.

The cathode (1) and anode (2) are connected to the outside (two high-pressure generators (6) and a cathode power source (7) (both not shown) through a Pelger unit (102) airtightly connected to the outside. cable (; therefore, it is connected.

The vacuum container (101) is made up of a Pelger (102) and a Pelger (108), and is airtight (sealed) by a backing (104) that has two contact surfaces.

<Yayyah (108)). 8, yay ('lifting mechanism (106) allows vertical direction 1
Two are movable.

On the center line of the X-ray beam emitted from the anode (2) placed on one Pelger (102): C: Place the sample stand (106) in such a position that the rotation center of the sample mounting plate is located.
is located. The sample stage (106) has a sample mounting plate (
It is attached to the pace (109) common to the pulse motor (108) that rotates the pace (107).
9) is one Perja (102) (2 vs. Pace (
109) It is equipped with a longitudinal fine movement mechanism (not shown) that can move the entire body back and forth in the direction of emission of the X-ray beam. In addition, the sample stage (106) is equipped with a vertical fine movement mechanism (not shown) that can move the sample mounting plate (107) in the vertical direction (two required lengths).The pulse motor (108) is equipped with a cable (
2) of a computer (not shown), and its rotation is controlled by calculation M (E).

Also, the side wall of Pelger (108) (the second is the anode (2)
An irradiation window (110) made of beryllium is provided for passing the X-ray beam emitted from the. Furthermore, one Pelger (102) is provided with an exhaust pipe (111) with a cock for evacuating the inside of the vacuum container (101).

1.411! + m LS 191 h> 3 tfI
Y 槁t' -A 1m if i I, B K
The X-ray detectors are placed at a predetermined distance apart, and are mounted and fixed on a pedestal (not shown). This X-ray detector (4
The configuration of 1) is the same as that described in the embodiments of FIGS. 1(a), (b), and (1:), so detailed explanation will be omitted.

A collimator (43) is positioned in front of the X-ray detector (1111) by a supporting member (not shown), and collimates the X-ray beam emitted from the anode (2) into a thin fan-shaped beam. Detector (-)

Each functional means of the vacuum X-ray CT apparatus of this embodiment, namely:
X-ray generation means (4), drive means (B), X-ray detection means (
C), data collection device (51), image preprocessing device (5)
2) The connections between the image reconstruction device (58), the TG* display device (54), and the computer that controls them are the same as the block connection diagram shown in FIG. 1(C).
Detailed explanation will be omitted.

Next, the operation of another embodiment of the present invention configured as described above will be explained.

First, the Pel jar (108) is raised by the Pel jar lifting mechanism (105). The distance between the X-ray generation point and the object to be inspected is set by the mechanism, and the slice plane of the object to be inspected (8) is set by the vertical fine movement mechanism of the sample stage (106).

After the above setting is completed, the Pel jar lifting mechanism (105) lowers the Pel jar (108) to the Pel jar (102) and brings it into close contact. Next, the inside of the vacuum container (101) is evacuated through the vacuum pump (2) through the exhaust pipe with cock (111), and the inside of the vacuum container (101) is brought to a predetermined vacuum. Tara,
Controlled by calculation #1 (6), intermittent rotation of the inspection object (8) on the sample stage (106) by the drive means [F]) in predetermined rotation angle increments, and X-rays by the X-ray generation means (A). The data collection device (51) performs synchronous collection of X-ray transmission data from the X-ray detection means (C), and continues the above-mentioned operations until the inspection object completes 360'' rotation. .Data collection device (51) during this measurement operation
)? data collection using the image preprocessing device (52), image reconstruction using the image reconstruction device (53), and tomography of the inspected object (S) using the tomographic image display device (54). Each operation of image display is shown in Figure 1 (→, (
Since this is the same as described in the embodiment of N, (→, detailed explanation will be omitted.

After the measurement of one slice surface is completed, the inside of the vacuum container (101) is returned to atmospheric pressure (second return, Pelger waiting mechanism (105)
Lift up the Pelger (108) and place it on the sample stage (10
6) (Set the next slicing plane from the second. From then on, use one Belger (1o8) and one Perger (102)
The next measuring operation (two people can be carried out) is done by simply lowering the container (101) to a close position and evacuating the inside of the vacuum container (101).

In the vacuum X-ray CT apparatus of this embodiment, the cathode (1)
, the anode (2) and the sample stage (106) are placed in the vacuum container α01.
) Since the object to be inspected (8) was stored in the anode (
2) It can be brought very close to the X-ray generation point,
Figure 1 ('') t
(b) The same effect as in the embodiment t(c) is achieved.

Next, we will discuss the further details of the vacuum X@CT apparatus according to the present invention.
An example of this will be described with reference to FIG. In this embodiment, instead of rotating the object to be inspected (8) (=, cathode (1)
), the pair of anode (2) and the X-ray detector are connected to the object to be inspected (i
9) (2 rotations. As shown in Fig. 7, a vacuum container (101) similar to that shown in Fig. 6 is
) one Pelger (102) C pulse motor (208
) is provided, and a sample holding plate (208'') of a sample stand (202) is arranged so as to protrude from a hole made in the center of the turntable (201). It is equipped with a vertical fine movement mechanism (not shown) that can move the mounting plate (208) a required length in the vertical direction, and the center of the sample mounting plate (208) is the center of rotation of the turntable (201). One Pelger (102) and two are fixed to match.

The peripheral part of the turntable (201) (the second is the X-ray detector (
, Io are arranged. In addition, a collimator is attached to the front of the X-ray detector (411). The configuration of this X-ray detector (41) is shown in Fig. 1 (1) j (b),
This is the same as that described in the embodiment (C). The center point of the arc length of the X-ray detector +41) and the turntable (201
) so that the X-ray generation point (0) of the anode (2) is located on a straight line connecting the center of rotation of the anode (202)
) is mounted on a turntable (201) facing the X-ray detector I with the X-ray detector I in between. A cathode (1) is fixed to a common base (204) with the anode (2) in a predetermined positional relationship with the anode (2). Sample mounting plate (20g) on sample stage (202) +: The distance between the set object to be inspected (8) and the X-ray generation point (0) of the anode (2) is set so that the required resolution can be obtained. (;, anode (2
) and the cathode (1) are fixed by setting the base (204) on the turntable (201) once at a desired position.

The cathode (1) and the cathode (2) are externally connected to a high pressure generator (6) and a cathode mold and source (7) (none of which are shown) in an airtight manner. In addition, the pulse motor that rotates the turntable (201) is similarly connected to a motor (not shown) by a cable 62, and its rotation is controlled by an IC. Each functional means of the vacuum X-ray CT apparatus of this embodiment, that is, the X-ray generating means), the driving means [with]), the X-ray detecting means (
Data collection device (51), image preprocessing device (52).

The connection between the image reconstruction device (5g), the tomographic display device (54), and the computer that controls them (see Figure 1(c))
Since it is the same as the block connection diagram shown in C, detailed explanation will be omitted.

In the vacuum X-ray C of this embodiment configured as described above, the apparatus is configured such that the object to be inspected (8) is stationary and the X-ray generation point of the anode and the object to be inspected are connected with the object to be inspected as the center of rotation. The only difference from the embodiment shown in Fig. 6 is that the inspection line detector that detects the transmitted X-rays is rotated, and the operation of the device and the effects obtained are the same as those shown in Fig. 6. Equivalent to example.

〔Effect of the invention〕

As described in detail above, according to the present invention, there is provided an X-ray generation cathode that outputs an electron beam for generating X-rays, and an
an X-ray generating means having a ray-generating anode and irradiating an object to be inspected placed near the anode with X-rays; an X-ray detection means for collimating and detecting the X-rays transmitted through the object to be inspected into a planar beam of a predetermined thickness including the X-ray generation point of the X-ray generation anode; drive means for relatively rotating the X-ray generating means, the X-ray detecting means, and the object to be inspected; In a vacuum X-ray CT apparatus equipped with an X-ray image processing means for obtaining a tomographic image, at least the X-ray generating anode and cathode and the object to be inspected are arranged in one vacuum-sealed area, for example, a main body case and a cap. By storing the inspection object in a true space or inside a vacuum container consisting of a Pelger and one Pelger, it is possible to bring the object to be inspected very close to the X-ray generation point of the anode. Therefore, it is possible to provide a vacuum X-ray CT apparatus that can sufficiently increase the resolution that can be detected.

[Brief explanation of the drawing]

FIGS. 1(a), (b), and (c) show a vacuum X-ray CT apparatus according to an embodiment of the present invention, and FIG. 1(a) shows the
Line image processing 1' A cross-sectional view showing the configuration of the part excluding the means, Figure 1 (b) is a YY arrow view of Figure 1 (,),
Figure (c) is a block connection diagram of each functional means of the device and the computer that controls them, and Figure 2 shows the X-ray generation point, the object to be inspected,
Figures 3, 4, and 5 (a) and (b) are explanatory diagrams showing the relationship between the position:i and the resolution of the X-ray detector, respectively, and Figure 1 (a). (b) and (C) are diagrams showing different modifications of the apparatus, FIG. 6 is a cutaway perspective view of essential parts showing another embodiment of the true 2 X-ray CT device according to the invention, and FIG. 7 is the invention FIG. 3 is a plan view showing still another embodiment of the vacuum X-ray CT apparatus according to the present invention, with the Pelger cut away. A... X-ray generating means B... Driving means C...
X-ray detection means D... X-ray image processing means E...
Computer S...Object to be inspected 0...X-ray generation point 1--Cathode for X-ray generation 2...Anode for X-ray generation 3-
... Shielding body 4 ... Cylinder body 5 ... Sealing lid
6... High voltage generator 7... Power supply for cathode
11...Cap 12...Irradiation window
13... Sample stand 14... Sample mounting plate 15
...Sample mounting plate support shaft 18...Base
19... Magnet 21... Heat sink 31...
・Body case 36... One-touch fastener 37...
Whole support stand 38...Pulse motor 39...Magnet 41...X-ray detector String...Single detector 4
... Collimator 51 ... Data collection device 5
2... Image preprocessing device 53... Image reconstruction device 54... Tomographic image display device 101... Vacuum container 102... One Pelger 108... Pelger 106... Sample stage 107. ...Sample mounting plate 108...Pulse motor 109...Base 110...Irradiation window 201...Turntable 202...Sample stage 20
3...Sample mounting plate 204...Pace agent
Patent Attorney Inoue - Oki 1 (ij-) Figure 2 Figure 5 (CL) (20-) Figure 6

Claims (1)

[Claims] It has an X-ray generation cathode that outputs an electron beam for generating X-rays, and an X-ray generation anode that receives the electron beam output from the cathode and generates X-rays, and is placed near the anode. An X-ray generating means for irradiating X-rays onto an object to be inspected; an X-ray detection means that collimates into a planar beam of a predetermined thickness including an X-ray generation point and detects the same; comprising: a drive means for rotating the object relatively; and an X-ray image processing means for processing the X-ray transmission data obtained from the X-ray detection means to obtain a tomographic image of the object to be inspected; A vacuum X-ray CT apparatus characterized in that at least the X-ray generating anode and cathode and the object to be inspected are housed in one vacuum-sealed area.