JPS61115129U - - Google Patents
Info
- Publication number
- JPS61115129U JPS61115129U JP20128284U JP20128284U JPS61115129U JP S61115129 U JPS61115129 U JP S61115129U JP 20128284 U JP20128284 U JP 20128284U JP 20128284 U JP20128284 U JP 20128284U JP S61115129 U JPS61115129 U JP S61115129U
- Authority
- JP
- Japan
- Prior art keywords
- waste gas
- treatment means
- gas treatment
- diluted
- discharged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002912 waste gas Substances 0.000 claims description 6
- 230000005856 abnormality Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984201282U JPH0344252Y2 (US20100268047A1-20101021-C00003.png) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984201282U JPH0344252Y2 (US20100268047A1-20101021-C00003.png) | 1984-12-28 | 1984-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61115129U true JPS61115129U (US20100268047A1-20101021-C00003.png) | 1986-07-21 |
| JPH0344252Y2 JPH0344252Y2 (US20100268047A1-20101021-C00003.png) | 1991-09-18 |
Family
ID=30762924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984201282U Expired JPH0344252Y2 (US20100268047A1-20101021-C00003.png) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344252Y2 (US20100268047A1-20101021-C00003.png) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51105679A (ja) * | 1975-03-13 | 1976-09-18 | Sony Corp | Gasusenjosochi |
| JPS5327961U (US20100268047A1-20101021-C00003.png) * | 1976-08-13 | 1978-03-09 | ||
| JPS5541883A (en) * | 1978-09-20 | 1980-03-24 | Hideto Fujii | Explosion preventing method and apparatus for dust collector using bag filter |
| JPS5657423A (en) * | 1979-10-16 | 1981-05-19 | Matsushita Electric Ind Co Ltd | Central cleaner |
| JPS5794323A (en) * | 1980-12-03 | 1982-06-11 | Stanley Electric Co Ltd | Treating method for waste gas of cvd apparatus |
| JPS6142321A (ja) * | 1984-08-06 | 1986-02-28 | Sony Corp | シランガス処理装置 |
-
1984
- 1984-12-28 JP JP1984201282U patent/JPH0344252Y2/ja not_active Expired
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51105679A (ja) * | 1975-03-13 | 1976-09-18 | Sony Corp | Gasusenjosochi |
| JPS5327961U (US20100268047A1-20101021-C00003.png) * | 1976-08-13 | 1978-03-09 | ||
| JPS5541883A (en) * | 1978-09-20 | 1980-03-24 | Hideto Fujii | Explosion preventing method and apparatus for dust collector using bag filter |
| JPS5657423A (en) * | 1979-10-16 | 1981-05-19 | Matsushita Electric Ind Co Ltd | Central cleaner |
| JPS5794323A (en) * | 1980-12-03 | 1982-06-11 | Stanley Electric Co Ltd | Treating method for waste gas of cvd apparatus |
| JPS6142321A (ja) * | 1984-08-06 | 1986-02-28 | Sony Corp | シランガス処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0344252Y2 (US20100268047A1-20101021-C00003.png) | 1991-09-18 |
