JPS61114831U - - Google Patents

Info

Publication number
JPS61114831U
JPS61114831U JP1984199363U JP19936384U JPS61114831U JP S61114831 U JPS61114831 U JP S61114831U JP 1984199363 U JP1984199363 U JP 1984199363U JP 19936384 U JP19936384 U JP 19936384U JP S61114831 U JPS61114831 U JP S61114831U
Authority
JP
Japan
Prior art keywords
frame
presser
moving body
moving
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984199363U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029555Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984199363U priority Critical patent/JPH029555Y2/ja
Publication of JPS61114831U publication Critical patent/JPS61114831U/ja
Application granted granted Critical
Publication of JPH029555Y2 publication Critical patent/JPH029555Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10W72/07141—

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP1984199363U 1984-12-28 1984-12-28 Expired JPH029555Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984199363U JPH029555Y2 (cg-RX-API-DMAC10.html) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984199363U JPH029555Y2 (cg-RX-API-DMAC10.html) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61114831U true JPS61114831U (cg-RX-API-DMAC10.html) 1986-07-19
JPH029555Y2 JPH029555Y2 (cg-RX-API-DMAC10.html) 1990-03-09

Family

ID=30759216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984199363U Expired JPH029555Y2 (cg-RX-API-DMAC10.html) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH029555Y2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023121542A (ja) * 2022-02-21 2023-08-31 三菱電機株式会社 半導体製造装置及び半導体製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023121542A (ja) * 2022-02-21 2023-08-31 三菱電機株式会社 半導体製造装置及び半導体製造方法

Also Published As

Publication number Publication date
JPH029555Y2 (cg-RX-API-DMAC10.html) 1990-03-09

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