JPS61114700U - - Google Patents
Info
- Publication number
- JPS61114700U JPS61114700U JP19666784U JP19666784U JPS61114700U JP S61114700 U JPS61114700 U JP S61114700U JP 19666784 U JP19666784 U JP 19666784U JP 19666784 U JP19666784 U JP 19666784U JP S61114700 U JPS61114700 U JP S61114700U
- Authority
- JP
- Japan
- Prior art keywords
- plasma discharge
- waveguide
- discharge device
- tube
- microwave plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
Landscapes
- Plasma Technology (AREA)
Description
第１図は本考案の一実施例のプラズマ放電装置
の要部を示す斜視図、第２図は従来のマイクロ波
プラズマ放電装置の導波管を示す断面図、第３図
はプラズマ放電の原理を示す図である。
１…終端パンチングメタル開孔部、２…パンチ
ングメタル筒、３…導波管、４…石英管。
Fig. 1 is a perspective view showing the main parts of a plasma discharge device according to an embodiment of the present invention, Fig. 2 is a sectional view showing a waveguide of a conventional microwave plasma discharge device, and Fig. 3 is the principle of plasma discharge. FIG. 1... End punched metal opening, 2... Punched metal tube, 3... Waveguide, 4... Quartz tube.
Claims (1)
は終端から1/4λｇの奇数倍になるようにし、終
端および電波漏洩防止筒を多数の通風口を有した
金属で構成したことを特徴とするマイクロ波プラ
ズマ放電装置。 A quartz tube is inserted into the wide side of the waveguide, and its center position is an odd multiple of 1/4λg from the end, and the end and radio wave leakage prevention tube are made of metal with many ventilation holes. Microwave plasma discharge device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19666784U JPS61114700U (en) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19666784U JPS61114700U (en) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61114700U true JPS61114700U (en) | 1986-07-19 |
Family
ID=30754503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19666784U Pending JPS61114700U (en) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61114700U (en) |
-
1984
- 1984-12-28 JP JP19666784U patent/JPS61114700U/ja active Pending
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