JPS61114700U - - Google Patents

Info

Publication number

JPS61114700U

JPS61114700U JP19666784U JP19666784U JPS61114700U JP S61114700 U JPS61114700 U JP S61114700U JP 19666784 U JP19666784 U JP 19666784U JP 19666784 U JP19666784 U JP 19666784U JP S61114700 U JPS61114700 U JP S61114700U

Authority

JP

Japan

Prior art keywords

plasma discharge

waveguide

discharge device

tube

microwave plasma

Prior art date

1984-12-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002184 metal Substances 0.000 claims description 3
• 239000010453 quartz Substances 0.000 claims description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 230000002265 prevention Effects 0.000 claims 1
• 238000009423 ventilation Methods 0.000 claims 1