JPS61114445U - - Google Patents
Info
- Publication number
- JPS61114445U JPS61114445U JP1984198781U JP19878184U JPS61114445U JP S61114445 U JPS61114445 U JP S61114445U JP 1984198781 U JP1984198781 U JP 1984198781U JP 19878184 U JP19878184 U JP 19878184U JP S61114445 U JPS61114445 U JP S61114445U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- mask
- protecting
- frame
- pellicle frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984198781U JPS638899Y2 (enExample) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984198781U JPS638899Y2 (enExample) | 1984-12-27 | 1984-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61114445U true JPS61114445U (enExample) | 1986-07-19 |
| JPS638899Y2 JPS638899Y2 (enExample) | 1988-03-16 |
Family
ID=30758093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984198781U Expired JPS638899Y2 (enExample) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS638899Y2 (enExample) |
-
1984
- 1984-12-27 JP JP1984198781U patent/JPS638899Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS638899Y2 (enExample) | 1988-03-16 |