JPS61112640U - - Google Patents

Info

Publication number
JPS61112640U
JPS61112640U JP19953684U JP19953684U JPS61112640U JP S61112640 U JPS61112640 U JP S61112640U JP 19953684 U JP19953684 U JP 19953684U JP 19953684 U JP19953684 U JP 19953684U JP S61112640 U JPS61112640 U JP S61112640U
Authority
JP
Japan
Prior art keywords
wafer
claw
transfer device
light emitting
claws
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19953684U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19953684U priority Critical patent/JPS61112640U/ja
Publication of JPS61112640U publication Critical patent/JPS61112640U/ja
Pending legal-status Critical Current

Links

JP19953684U 1984-12-26 1984-12-26 Pending JPS61112640U (US07860544-20101228-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19953684U JPS61112640U (US07860544-20101228-C00003.png) 1984-12-26 1984-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19953684U JPS61112640U (US07860544-20101228-C00003.png) 1984-12-26 1984-12-26

Publications (1)

Publication Number Publication Date
JPS61112640U true JPS61112640U (US07860544-20101228-C00003.png) 1986-07-16

Family

ID=30759550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19953684U Pending JPS61112640U (US07860544-20101228-C00003.png) 1984-12-26 1984-12-26

Country Status (1)

Country Link
JP (1) JPS61112640U (US07860544-20101228-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425151A (ja) * 1990-05-21 1992-01-28 Canon Inc 薄板検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425151A (ja) * 1990-05-21 1992-01-28 Canon Inc 薄板検出装置

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