JPS61112266U - - Google Patents
Info
- Publication number
- JPS61112266U JPS61112266U JP19608384U JP19608384U JPS61112266U JP S61112266 U JPS61112266 U JP S61112266U JP 19608384 U JP19608384 U JP 19608384U JP 19608384 U JP19608384 U JP 19608384U JP S61112266 U JPS61112266 U JP S61112266U
- Authority
- JP
- Japan
- Prior art keywords
- capillary column
- silicon wafer
- shaped
- plate
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19608384U JPS61112266U (enExample) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19608384U JPS61112266U (enExample) | 1984-12-26 | 1984-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112266U true JPS61112266U (enExample) | 1986-07-16 |
Family
ID=30753727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19608384U Pending JPS61112266U (enExample) | 1984-12-26 | 1984-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112266U (enExample) |
-
1984
- 1984-12-26 JP JP19608384U patent/JPS61112266U/ja active Pending