JPS61112224U - - Google Patents

Info

Publication number
JPS61112224U
JPS61112224U JP19952984U JP19952984U JPS61112224U JP S61112224 U JPS61112224 U JP S61112224U JP 19952984 U JP19952984 U JP 19952984U JP 19952984 U JP19952984 U JP 19952984U JP S61112224 U JPS61112224 U JP S61112224U
Authority
JP
Japan
Prior art keywords
plate
karman
vortex flowmeter
karman vortex
displacements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19952984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19952984U priority Critical patent/JPS61112224U/ja
Publication of JPS61112224U publication Critical patent/JPS61112224U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP19952984U 1984-12-26 1984-12-26 Pending JPS61112224U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19952984U JPS61112224U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19952984U JPS61112224U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Publications (1)

Publication Number Publication Date
JPS61112224U true JPS61112224U (enrdf_load_stackoverflow) 1986-07-16

Family

ID=30759537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19952984U Pending JPS61112224U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Country Status (1)

Country Link
JP (1) JPS61112224U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029555A (en) * 1988-03-10 1991-07-09 International Business Machines Corporation Wafer holder method and apparatus in a vacuum deposition system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029555A (en) * 1988-03-10 1991-07-09 International Business Machines Corporation Wafer holder method and apparatus in a vacuum deposition system

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