JPS61112224U - - Google Patents
Info
- Publication number
- JPS61112224U JPS61112224U JP19952984U JP19952984U JPS61112224U JP S61112224 U JPS61112224 U JP S61112224U JP 19952984 U JP19952984 U JP 19952984U JP 19952984 U JP19952984 U JP 19952984U JP S61112224 U JPS61112224 U JP S61112224U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- karman
- vortex flowmeter
- karman vortex
- displacements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001259 photo etching Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19952984U JPS61112224U (de) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19952984U JPS61112224U (de) | 1984-12-26 | 1984-12-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61112224U true JPS61112224U (de) | 1986-07-16 |
Family
ID=30759537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19952984U Pending JPS61112224U (de) | 1984-12-26 | 1984-12-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61112224U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5029555A (en) * | 1988-03-10 | 1991-07-09 | International Business Machines Corporation | Wafer holder method and apparatus in a vacuum deposition system |
-
1984
- 1984-12-26 JP JP19952984U patent/JPS61112224U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5029555A (en) * | 1988-03-10 | 1991-07-09 | International Business Machines Corporation | Wafer holder method and apparatus in a vacuum deposition system |
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