JPS61111588U - - Google Patents
Info
- Publication number
- JPS61111588U JPS61111588U JP20178084U JP20178084U JPS61111588U JP S61111588 U JPS61111588 U JP S61111588U JP 20178084 U JP20178084 U JP 20178084U JP 20178084 U JP20178084 U JP 20178084U JP S61111588 U JPS61111588 U JP S61111588U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- coupling part
- air
- opening
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20178084U JPS61111588U (enExample) | 1984-12-24 | 1984-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20178084U JPS61111588U (enExample) | 1984-12-24 | 1984-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61111588U true JPS61111588U (enExample) | 1986-07-15 |
Family
ID=30763887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20178084U Pending JPS61111588U (enExample) | 1984-12-24 | 1984-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61111588U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4720947U (enExample) * | 1971-04-08 | 1972-11-09 | ||
| JPS5910583B2 (ja) * | 1978-05-29 | 1984-03-09 | 沖電気工業株式会社 | 半導体装置の製造方法 |
-
1984
- 1984-12-24 JP JP20178084U patent/JPS61111588U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4720947U (enExample) * | 1971-04-08 | 1972-11-09 | ||
| JPS5910583B2 (ja) * | 1978-05-29 | 1984-03-09 | 沖電気工業株式会社 | 半導体装置の製造方法 |